Silicon/Silica Colloidal Waste in the Semiconductor Industry: Challenges in Recovery and Potential Use

IF 3.9 2区 化学 Q2 CHEMISTRY, MULTIDISCIPLINARY
HinMan Mah, YenMin Chew, SiewChun Low, TattWai Wan and JitKang Lim*, 
{"title":"Silicon/Silica Colloidal Waste in the Semiconductor Industry: Challenges in Recovery and Potential Use","authors":"HinMan Mah,&nbsp;YenMin Chew,&nbsp;SiewChun Low,&nbsp;TattWai Wan and JitKang Lim*,&nbsp;","doi":"10.1021/acs.langmuir.4c0349010.1021/acs.langmuir.4c03490","DOIUrl":null,"url":null,"abstract":"<p >The backgrinding of silicon (Si) wafers has resulted in a loss of ∼70% of valuable Si materials. Consequently, an effluent known as diluted backgrinding wastewater (DBGW) is generated, containing nanosized silicon/silica colloids. Here, we discussed the challenges associated with the effective separation of Si-based waste from the DBGW based upon two perspectives, namely, a nanosized effect and a colloidal stability effect. Then, we revealed the limitation with the currently used coagulation-flocculation approach, which introduces impurities into the highly pure Si. Membrane-based filtration techniques have been adopted, but the serious fouling problem associated with colloidal Si/SiO<sub>2</sub> renders them almost impractical. Apart from that, the potential use of highly pure Si waste generated in the semiconductor industry in lithium ion batteries (LIBs) has been discussed. This Perspective aims to provide insights into the challenges associated with the Si recovery from DBGW and suggests its potential use in LIBs.</p>","PeriodicalId":50,"journal":{"name":"Langmuir","volume":"41 11","pages":"7151–7159 7151–7159"},"PeriodicalIF":3.9000,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Langmuir","FirstCategoryId":"92","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acs.langmuir.4c03490","RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
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Abstract

The backgrinding of silicon (Si) wafers has resulted in a loss of ∼70% of valuable Si materials. Consequently, an effluent known as diluted backgrinding wastewater (DBGW) is generated, containing nanosized silicon/silica colloids. Here, we discussed the challenges associated with the effective separation of Si-based waste from the DBGW based upon two perspectives, namely, a nanosized effect and a colloidal stability effect. Then, we revealed the limitation with the currently used coagulation-flocculation approach, which introduces impurities into the highly pure Si. Membrane-based filtration techniques have been adopted, but the serious fouling problem associated with colloidal Si/SiO2 renders them almost impractical. Apart from that, the potential use of highly pure Si waste generated in the semiconductor industry in lithium ion batteries (LIBs) has been discussed. This Perspective aims to provide insights into the challenges associated with the Si recovery from DBGW and suggests its potential use in LIBs.

Abstract Image

半导体工业中的硅/二氧化硅胶体废物:回收和潜在利用的挑战
硅(Si)晶圆的背磨导致了约70%有价值的硅材料的损失。因此,产生了一种被称为稀释后磨废水(DBGW)的流出物,其中含有纳米级硅/二氧化硅胶体。在这里,我们从纳米效应和胶体稳定性两个角度讨论了从DBGW中有效分离si基废物所面临的挑战。然后,我们揭示了目前使用的混凝-絮凝方法的局限性,该方法将杂质引入高纯Si中。基于膜的过滤技术已被采用,但与胶体Si/SiO2相关的严重污染问题使其几乎不切实际。除此之外,还讨论了半导体工业中产生的高纯度硅废料在锂离子电池(LIBs)中的潜在用途。本展望旨在提供与DBGW中Si回收相关的挑战的见解,并提出其在lib中的潜在应用。
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来源期刊
Langmuir
Langmuir 化学-材料科学:综合
CiteScore
6.50
自引率
10.30%
发文量
1464
审稿时长
2.1 months
期刊介绍: Langmuir is an interdisciplinary journal publishing articles in the following subject categories: Colloids: surfactants and self-assembly, dispersions, emulsions, foams Interfaces: adsorption, reactions, films, forces Biological Interfaces: biocolloids, biomolecular and biomimetic materials Materials: nano- and mesostructured materials, polymers, gels, liquid crystals Electrochemistry: interfacial charge transfer, charge transport, electrocatalysis, electrokinetic phenomena, bioelectrochemistry Devices and Applications: sensors, fluidics, patterning, catalysis, photonic crystals However, when high-impact, original work is submitted that does not fit within the above categories, decisions to accept or decline such papers will be based on one criteria: What Would Irving Do? Langmuir ranks #2 in citations out of 136 journals in the category of Physical Chemistry with 113,157 total citations. The journal received an Impact Factor of 4.384*. This journal is also indexed in the categories of Materials Science (ranked #1) and Multidisciplinary Chemistry (ranked #5).
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