Gas sensors on CMOS

IF 33.7 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2025-03-24 DOI:10.1038/s41928-025-01371-9

Yan Huang

引用次数: 0

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CMOS气体传感器

来自大阪大学、日本国家材料科学研究所、筑波大学和南加州大学的研究人员制造了一种用于气体传感的16通道膜型表面应力传感器。通过改变涂覆在每个膜上的受体材料，可以区分多个气源。传感器阵列的终端通过带有微泵的电极垂直连接到专用读出电路。该装置能对同时存在的氨和甲苯做出反应，氨的检出限为0.1 ppm。除了气体传感外，该装置还具有温度和湿度传感能力。原始参考：3.5×3.5mm2 1.47mW/ch 16通道MSS-CMOS异构多模态气体传感器芯片堆栈。《工程学报》，2015年。固体电路会议（2025）；https://www.isscc.org/program-overview

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

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