{"title":"Gas sensors on CMOS","authors":"Yan Huang","doi":"10.1038/s41928-025-01371-9","DOIUrl":null,"url":null,"abstract":"<p>The researchers — who are based at Osaka University, the National Institute for Materials Science, the University of Tsukuba and the University of Southern California — fabricated a 16-channel membrane-type surface-stress sensor for gas sensing. By varying the receptor material coated on top of each membrane, multiple gas sources could be differentiated. The terminals of the sensor array were vertically connected to a specialized readout circuit via electrodes with micropumps. The device could respond to the simultaneous presence of ammonia and toluene, and the limit of detection of ammonia was 0.1 ppm. In addition to gas sensing, the device also showed temperature and humidity sensing capability.</p><p><b>Original reference:</b> A 3.5×3.5mm<sup>2</sup> 1.47mW/ch 16-channel MSS-CMOS heterogeneous multi-modal-gas-sensor chip stack. In <i>Proc. 2025 IEEE Int. Solid-State Circuits Conference</i> (2025); https://www.isscc.org/program-overview</p>","PeriodicalId":19064,"journal":{"name":"Nature Electronics","volume":"7 1","pages":""},"PeriodicalIF":33.7000,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nature Electronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41928-025-01371-9","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
The researchers — who are based at Osaka University, the National Institute for Materials Science, the University of Tsukuba and the University of Southern California — fabricated a 16-channel membrane-type surface-stress sensor for gas sensing. By varying the receptor material coated on top of each membrane, multiple gas sources could be differentiated. The terminals of the sensor array were vertically connected to a specialized readout circuit via electrodes with micropumps. The device could respond to the simultaneous presence of ammonia and toluene, and the limit of detection of ammonia was 0.1 ppm. In addition to gas sensing, the device also showed temperature and humidity sensing capability.
Original reference: A 3.5×3.5mm2 1.47mW/ch 16-channel MSS-CMOS heterogeneous multi-modal-gas-sensor chip stack. In Proc. 2025 IEEE Int. Solid-State Circuits Conference (2025); https://www.isscc.org/program-overview
期刊介绍：
Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research.
The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society.
Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting.
In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.
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