Ruiqing Lu, Felix Theska, Shenglu Lu, Hao Wang, Ma Qian, Sophie Primig, Simon P Ringer, Xiaozhou Liao
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引用次数: 0
Abstract
Preparing atom probe tomography (APT) samples of dual-phase Ti alloys can be challenging. The existing focused ion beam (FIB) lift-out method is time-consuming and requires intensive experience in the process. Here, we combined electropolishing and FIB annular milling as a novel approach for the APT sample preparation of dual-phase Ti alloys. Electrochemical polishing is used to pre-sharpen the APT tip, while the FIB annular milling is used for fine polishing. This method reduces the preparation time by 40% compared to the existing site-specific FIB lift-out technique while maintaining similar background noise and mass resolution, as well as achieving a reduction in thermal tails in the mass spectrum. In this article, step-by-step procedures of this sample preparation method are described in detail, and the sample quality using this method is compared with that of samples prepared using the FIB lift-out method.
期刊介绍：
Microscopy and Microanalysis publishes original research papers in the fields of microscopy, imaging, and compositional analysis. This distinguished international forum is intended for microscopists in both biology and materials science. The journal provides significant articles that describe new and existing techniques and instrumentation, as well as the applications of these to the imaging and analysis of microstructure. Microscopy and Microanalysis also includes review articles, letters to the editor, and book reviews.
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