Byeongjoon Jeong, Heejoo Choi, Daewook Kim, Youngsik Kim
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引用次数: 0
Abstract
In this study, we present a through-focus re-radiation simulation aimed at detecting scattering from semiconductor structures. We employ the beam synthesis propagation (BSP) module within the finite-difference time-domain (FDTD) method, optimizing the simulation of optical systems by reducing time and computational resources typically required for imaging and illumination. To validate the approach, we simulated scattering from Silicon nitride (Si3N4) lines on a silicon (Si) substrate with various defect sizes and types at a 193 nm wavelength. The results demonstrated the detection of specific defect signals and identified the limitations of detectable defect sizes. These findings are intended to serve as pre-processing data for predicting outcomes in through-focus scanning optical microscopy (TSOM) imaging.
期刊介绍：
Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is:
General and physical optics;
Quantum optics and spectroscopy;
Information optics;
Photonics and optoelectronics;
Biomedical photonics and biological optics;
Lasers;
Nonlinear optics;
Optical systems and technologies;
Optical materials and manufacturing technologies;
Vision;
Infrared and short wavelength optics;
Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies;
Other optical methods and applications.
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