Study of Zinc Implanted Crystalline Quartz

IF 0.5 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-03-17 DOI:10.1134/S1027451024702045

V. V. Privezentsev, A. A. Firsov, V. S. Kulikauskas, M. I. Voronova, D. A. Kiselev, B. R. Senatulin

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Abstract

The results of a study of crystalline quartz implanted by ⁶⁴Zn⁺ ions with a dose of 5 × 10¹⁶/cm² and an energy of 40 keV are presented. The samples were annealed in air in steps of 100°C for 1 h at each step in the temperature range of 400−700°C. The methods used for the study were atomic force microscopy, X-ray diffraction phase analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. It was found that after implantation, the phases of metallic zinc Zn and carbon C were fixed in the near-surface layer. After annealing at 700°C, the zinc oxide phase ZnO appears, and after annealing above 700°C, the zinc silicide phase Zn₂SiO₄ appears. It was found that after annealing at 400°C the roughness increases by 2 orders of magnitude compared to the state after implantation, and after annealing at 700°C, the roughness of the quartz surface decreases by an order of magnitude compared to annealing at 400°C. After annealing at 700°C, numerous Zn-containing nanoparticles and craters are fixed on the surface and a zinc silicide phase is formed.

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.