Features of Magnetron Deposition by Sputtering Boron Target in Reactive Gases Medium

IF 0.5 Q4 PHYSICS, CONDENSED MATTER
G. Yu. Yushkov, V. D. Gridilev, A. G. Nikolaev
{"title":"Features of Magnetron Deposition by Sputtering Boron Target in Reactive Gases Medium","authors":"G. Yu. Yushkov,&nbsp;V. D. Gridilev,&nbsp;A. G. Nikolaev","doi":"10.1134/S1027451024701908","DOIUrl":null,"url":null,"abstract":"<p>Boron-based coatings possess a number of useful properties and their synthesis is an important concern. These coatings can be produced by magnetron sputtering of a pure boron target in a reactive gas atmosphere such as oxygen, nitrogen, or acetylene. The use of a pure boron target in a conventional magnetron sputter system is difficult, because under normal conditions boron has high electrical resistivity of about 10 MΩ cm. However, since boron is a semiconductor material, its resistivity drops sharply with increasing temperature. A boron target, thermally insulated from the cooled magnetic system, can be gradually heated by the magnetron discharge to a temperature of 450–750°С and can sustain a stable discharge in a reactive gas or argon atmosphere. Using such a magnetron sputtering system, we have fabricated boron coatings in a reactive gas environment. Here we describe the properties of these coatings, their deposition rate, and the characteristics of the magnetron sputtering system.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"18 1 supplement","pages":"S84 - S90"},"PeriodicalIF":0.5000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451024701908","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0

Abstract

Boron-based coatings possess a number of useful properties and their synthesis is an important concern. These coatings can be produced by magnetron sputtering of a pure boron target in a reactive gas atmosphere such as oxygen, nitrogen, or acetylene. The use of a pure boron target in a conventional magnetron sputter system is difficult, because under normal conditions boron has high electrical resistivity of about 10 MΩ cm. However, since boron is a semiconductor material, its resistivity drops sharply with increasing temperature. A boron target, thermally insulated from the cooled magnetic system, can be gradually heated by the magnetron discharge to a temperature of 450–750°С and can sustain a stable discharge in a reactive gas or argon atmosphere. Using such a magnetron sputtering system, we have fabricated boron coatings in a reactive gas environment. Here we describe the properties of these coatings, their deposition rate, and the characteristics of the magnetron sputtering system.

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来源期刊
CiteScore
0.90
自引率
25.00%
发文量
144
审稿时长
3-8 weeks
期刊介绍: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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