D. G. Reunov, A. D. Akhsakhalyan, E. I. Glushkov, I. G. Zabrodin, I. V. Malyshev, M. S. Mikhailenko, E. V. Petrakov, A. K. Chernyshev, N. I. Chkhalo
{"title":"Stand for Certification of X-ray Optical Elements and Systems for Synchrotron Applications","authors":"D. G. Reunov, A. D. Akhsakhalyan, E. I. Glushkov, I. G. Zabrodin, I. V. Malyshev, M. S. Mikhailenko, E. V. Petrakov, A. K. Chernyshev, N. I. Chkhalo","doi":"10.1134/S1027451024701842","DOIUrl":null,"url":null,"abstract":"<p>The article describes an X-ray optical certification setup based on a microfocus X-ray tube, a Kirkpatrick-Baez (KB) collimating system, and a Gpixel2020BSI matrix semiconductor detector. To minimize X-ray beam scattering and intensity loss due to absorption in air, vacuum-tight tubes with compton windows are installed between the microfocus X-ray tube and the KB system, and between the KB system and the detector. Pumping is performed by an oil-free fore-vacuum pump. The setup that has been developed allows for studying the X-ray optical scheme of two-mirror monochromators to determine the deformation of the beam wave front at their outputs, and to calibrate the movement of high-precision mechanical tables. The setup also allows for studying the focusing properties of the Kirkpatrick-Baez system, itself, namely, measuring the size of the focus spot and calibrating the piezo-drives of the mirrors. As a result of adjusting the collimating system, we obtained a converging beam, but this did not prevent us from measuring the wave front broadening upon reflection from the substrates for a two-mirror monochromator. Two substrates made of single-crystal silicon Si(100) were studied. It was shown that upon reflection from the substrate after chemical-mechanical polishing (CMP) only, the reflected beam, due to mirror shape errors, broadened by 18 μm, while after chemical-mechanical polishing and correction of local shape errors using an ion beam, the broadening was reduced to 11 μm, which corresponds to an angular error of the mirror at a level of 3 μrad. This is 7 times less than the angular divergence of the beam at the output of the collimating system, due to the size of the radiation source.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"18 1 supplement","pages":"S38 - S44"},"PeriodicalIF":0.5000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451024701842","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0
Abstract
The article describes an X-ray optical certification setup based on a microfocus X-ray tube, a Kirkpatrick-Baez (KB) collimating system, and a Gpixel2020BSI matrix semiconductor detector. To minimize X-ray beam scattering and intensity loss due to absorption in air, vacuum-tight tubes with compton windows are installed between the microfocus X-ray tube and the KB system, and between the KB system and the detector. Pumping is performed by an oil-free fore-vacuum pump. The setup that has been developed allows for studying the X-ray optical scheme of two-mirror monochromators to determine the deformation of the beam wave front at their outputs, and to calibrate the movement of high-precision mechanical tables. The setup also allows for studying the focusing properties of the Kirkpatrick-Baez system, itself, namely, measuring the size of the focus spot and calibrating the piezo-drives of the mirrors. As a result of adjusting the collimating system, we obtained a converging beam, but this did not prevent us from measuring the wave front broadening upon reflection from the substrates for a two-mirror monochromator. Two substrates made of single-crystal silicon Si(100) were studied. It was shown that upon reflection from the substrate after chemical-mechanical polishing (CMP) only, the reflected beam, due to mirror shape errors, broadened by 18 μm, while after chemical-mechanical polishing and correction of local shape errors using an ion beam, the broadening was reduced to 11 μm, which corresponds to an angular error of the mirror at a level of 3 μrad. This is 7 times less than the angular divergence of the beam at the output of the collimating system, due to the size of the radiation source.
期刊介绍：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
