Chemiresistive gas-sensing properties of spray-deposited In2O3 thin films

Abstract

In the present work, In₂O₃ nanorods thin films were successfully prepared by spraying indium trichloride on the hot glass plate at 300 °C. The developed films were characterized with X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), and Transmission electron microscopy (TEM) techniques to recognize the crystalline nature, exterior morphology, and microstructure characteristics. The crystal nature and grain size were found to be less than 18, 70, and 50 nm, respectively. The efficiency of gas sensing of the as-developed self-assembled thin films of In₂O₃ nanorods, sprayed for various absorptions of the solution, was examined on disclosure of different traditional gases. The thin film prepared for 0.1 M (Sample = S2) concentration was detected to be of utmost delicate (S = 3280) to ethanol at 300 °C. The sensor demonstrates rapid reaction (5 s) and rapid retrieval (8 s).