Properties of Multicomponent (TiBSiNi + Cr)N Coatings Produced via Vacuum-Arc Deposition with the Assisting Action of Gas-Discharge Plasma

IF 0.5 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-03-17 DOI:10.1134/S1027451024702070

A. A. Leonov, V. M. Savostikov, V. V. Denisov, Yu. A. Denisova, M. A. Khimich, M. V. Savchuk, M. S. Syrtanov, A. V. Pirozhkov, A. B. Skosyrskii

{"title":"Properties of Multicomponent (TiBSiNi + Cr)N Coatings Produced via Vacuum-Arc Deposition with the Assisting Action of Gas-Discharge Plasma","authors":"A. A. Leonov, V. M. Savostikov, V. V. Denisov, Yu. A. Denisova, M. A. Khimich, M. V. Savchuk, M. S. Syrtanov, A. V. Pirozhkov, A. B. Skosyrskii","doi":"10.1134/S1027451024702070","DOIUrl":null,"url":null,"abstract":"This work presents the results of studying the physical–mechanical and tribological characteristics of vacuum-arc coatings with a multicomponent composition (TiBSiNi + Cr)N, deposited under two variants of the assisting action of gas-discharge plasma ions: using a conventional plasma source with a heated cathode and through a relatively new generation scheme involving beam-plasma formation. A comparison of the results shows a clear advantage of the new synthesis method for the specified coating. For instance, the hardness of the (TiBSiNi + Cr)N coating synthesized using conventional assistance with a plasma source featuring a heated cathode is 29 GPa, whereas the coating synthesized using the beam-plasma generation pattern has a hardness of 39 GPa. Simultaneously, a reduced surface roughness is observed for the coating produced using the beam-plasma generation system, compared to the coating synthesized with conventional assistance. This is evident both in the average deviation of the surface profile Ra and in the parameter for the height of surface irregularities Rz. This difference is likely related to a greater uniformity and integral density of the gas-discharge plasma in the beam-plasma generation mode, and consequently, to the higher effectiveness of its impact on the deposited coating. A significant difference in the tribological properties of the coatings produced by the two assistance methods is also identified. The average values of the friction coefficient and the wear parameter for the coating synthesized using conventional assistance (0.504 and 1.42 × 10–7 mm3 N–1 m–1, respectively) are higher than those for the coating synthesized through the beam-plasma generation scheme (0.434 and 0.99 × 10–7 mm3 N–1 m–1). Moreover, in situ X-ray diffraction analysis reveals that during heating in air, the phase composition of the (TiBSiNi + Cr)N coating produced using the beam-plasma generation scheme remains stable up to a temperature of 1075°C.","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"18 1 supplement","pages":"S205 - S212"},"PeriodicalIF":0.5000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451024702070","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}

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Abstract

This work presents the results of studying the physical–mechanical and tribological characteristics of vacuum-arc coatings with a multicomponent composition (TiBSiNi + Cr)N, deposited under two variants of the assisting action of gas-discharge plasma ions: using a conventional plasma source with a heated cathode and through a relatively new generation scheme involving beam-plasma formation. A comparison of the results shows a clear advantage of the new synthesis method for the specified coating. For instance, the hardness of the (TiBSiNi + Cr)N coating synthesized using conventional assistance with a plasma source featuring a heated cathode is 29 GPa, whereas the coating synthesized using the beam-plasma generation pattern has a hardness of 39 GPa. Simultaneously, a reduced surface roughness is observed for the coating produced using the beam-plasma generation system, compared to the coating synthesized with conventional assistance. This is evident both in the average deviation of the surface profile R_a and in the parameter for the height of surface irregularities R_z. This difference is likely related to a greater uniformity and integral density of the gas-discharge plasma in the beam-plasma generation mode, and consequently, to the higher effectiveness of its impact on the deposited coating. A significant difference in the tribological properties of the coatings produced by the two assistance methods is also identified. The average values of the friction coefficient and the wear parameter for the coating synthesized using conventional assistance (0.504 and 1.42 × 10^–7 mm³ N^–1 m^–1, respectively) are higher than those for the coating synthesized through the beam-plasma generation scheme (0.434 and 0.99 × 10^–7 mm³ N^–1 m^–1). Moreover, in situ X-ray diffraction analysis reveals that during heating in air, the phase composition of the (TiBSiNi + Cr)N coating produced using the beam-plasma generation scheme remains stable up to a temperature of 1075°C.

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气体放电等离子体辅助真空电弧沉积制备多组分TiBSiNi + Cr N涂层的性能

本文介绍了在两种气体放电等离子体离子辅助作用下沉积的多组分（TiBSiNi + Cr）N真空电弧涂层的物理力学和摩擦学特性的研究结果：使用带有加热阴极的传统等离子体源和通过涉及束等离子体形成的相对较新的生成方案。结果表明，新合成方法对特定涂层具有明显的优势。例如，使用具有加热阴极的等离子体源的传统辅助合成的（TiBSiNi + Cr）N涂层的硬度为29 GPa，而使用束等离子体生成模式合成的涂层的硬度为39 GPa。同时，与传统辅助合成的涂层相比，使用束等离子体产生系统生产的涂层表面粗糙度降低。这在表面轮廓的平均偏差Ra和表面不规则度高度参数Rz中都很明显。这种差异可能与束等离子体产生模式下气体放电等离子体的均匀性和整体密度有关，因此，它对沉积涂层的影响效率更高。两种辅助方法制备的涂层的摩擦学性能也有显著差异。常规辅助合成涂层的摩擦系数和磨损参数平均值（分别为0.504和1.42 × 10-7 mm3 N-1 m-1）高于束等离子体产生方案合成涂层的摩擦系数和磨损参数平均值（0.434和0.99 × 10-7 mm3 N-1 m-1）。此外，原位x射线衍射分析表明，在空气中加热过程中，使用束等离子体产生方案生产的（TiBSiNi + Cr）N涂层的相组成在1075°C的温度下保持稳定。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.