Behavior of poly(methyl methacrylate) exposed to extreme ultraviolet laser radiation: A relationship between the high-energy photo-decomposition of the polymer and the mass spectra of emitted ions

IF 6.3 2区化学 Q1 POLYMER SCIENCE

Polymer Degradation and Stability Pub Date : 2025-03-09 DOI:10.1016/j.polymdegradstab.2025.111298

L. Vyšín , J. Chalupský , L.A. Rush , L. Fekete , J. Bulička , P. Mojzeš , Z. Kuglerová , J. Krása , L. Juha , J.J. Rocca , C.S. Menoni

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引用次数: 0

Abstract

This study investigates the fluence-dependent fragmentation of poly(methyl methacrylate) (PMMA) when irradiated with focused extreme ultraviolet (EUV) 26.4-eV photons, using an extreme ultraviolet laser ablation mass spectrometer (EUV LA-MS). Our findings reveal two critical fluence thresholds: the ablation threshold fluence (F_th=9 mJ·cm⁻²), after which the material begins to desorb and ionize nonthermally, and the transition fluence (F_tr=110 mJ·cm⁻²), where the interaction shifts to a thermal regime characterized by a nonlinear response in crater formation. The new nonlinear response function recovery (NoReFry) algorithm was used to reconstruct the dose-response curve, using detailed topographical data from atomic force microscopy scans of the ablated craters, enhancing estimation of beam fluence during the experiments. The mass spectra obtained during ablation showed distinct fragmentation pathways that evolve with fluence. Nonthermal conditions primarily produce small fragments, including short-chain ions and gaseous species, while the thermal regime allows for greater fragmentation complexity and the formation of higher molecular weight species. Using experimental data and Monte Carlo simulations, we compared the effects of nano- and femtosecond pulses on the ablation threshold of PMMA. Comprehensive analysis of the mass spectra highlights the dynamics of photoinduced processes, providing insight into the ablation and ionization mechanisms critical for applications in materials processing with EUV radiation.

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来源期刊

Polymer Degradation and Stability 化学-高分子科学

CiteScore

10.10

自引率

10.20%

发文量

325

审稿时长

23 days

期刊介绍： Polymer Degradation and Stability deals with the degradation reactions and their control which are a major preoccupation of practitioners of the many and diverse aspects of modern polymer technology. Deteriorative reactions occur during processing, when polymers are subjected to heat, oxygen and mechanical stress, and during the useful life of the materials when oxygen and sunlight are the most important degradative agencies. In more specialised applications, degradation may be induced by high energy radiation, ozone, atmospheric pollutants, mechanical stress, biological action, hydrolysis and many other influences. The mechanisms of these reactions and stabilisation processes must be understood if the technology and application of polymers are to continue to advance. The reporting of investigations of this kind is therefore a major function of this journal. However there are also new developments in polymer technology in which degradation processes find positive applications. For example, photodegradable plastics are now available, the recycling of polymeric products will become increasingly important, degradation and combustion studies are involved in the definition of the fire hazards which are associated with polymeric materials and the microelectronics industry is vitally dependent upon polymer degradation in the manufacture of its circuitry. Polymer properties may also be improved by processes like curing and grafting, the chemistry of which can be closely related to that which causes physical deterioration in other circumstances.