{"title":"Microstructural, mechanical and tribological performances of DLC/CrN multilayer films with different modulation period","authors":"Yanchao Zhao, Feng Xu, Liu Yuan, Wenxuan Zhao, Hailong Zhang, Dunwen Zuo","doi":"10.1016/j.diamond.2025.112163","DOIUrl":null,"url":null,"abstract":"<div><div>Multilayer structure design is an effective method to improve the mechanical and tribological properties of hard films. In this work, diamond-like carbon (DLC)/CrN multilayer composite films with varying modulation periods were successfully deposited on 35Cr2Ni4MoA steel and Si substrates using unbalanced magnetron sputtering, and the microstructure, mechanical and tribological performances of DLC/CrN multilayer composite films were analyzed detailedly. SEM and TEM characterization confirmed that the DLC/CrN multilayer composite films consist of alternating amorphous DLC layers and crystalline CrN layers. The intensity of the (111) diffraction peaks in DLC multilayer composite film exhibited a varying degree of reduction, and the 2θ positions of the (111) and (200) diffraction peaks showed a slight rightward shift. Raman analysis shown that the modulation period had a negligible impact on the sp<sup>3</sup> hybridized carbon content of DLC/CrN multilayer composite films. Reduced residual stress and enhanced toughness by designing multilayer structural with modulation periods. As the modulation period decreased, the hardness and elastic modulus of DLC multilayer composite films increased. The tribological performances indicated that the primary wear mechanism between DLC/CrN multilayer composite films and Si<sub>3</sub>N<sub>4</sub> ball in an atmospheric environment was abrasive wear, and film M2 exhibited the best tribological performance. Compared to single-layer DLC films, the residual stress of DLC/CrN multilayer composite films has been reduced by more than half, and the fracture toughness and wear rate have been significantly improved.</div></div>","PeriodicalId":11266,"journal":{"name":"Diamond and Related Materials","volume":"154 ","pages":"Article 112163"},"PeriodicalIF":4.3000,"publicationDate":"2025-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Diamond and Related Materials","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0925963525002201","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
引用次数: 0
Abstract
Multilayer structure design is an effective method to improve the mechanical and tribological properties of hard films. In this work, diamond-like carbon (DLC)/CrN multilayer composite films with varying modulation periods were successfully deposited on 35Cr2Ni4MoA steel and Si substrates using unbalanced magnetron sputtering, and the microstructure, mechanical and tribological performances of DLC/CrN multilayer composite films were analyzed detailedly. SEM and TEM characterization confirmed that the DLC/CrN multilayer composite films consist of alternating amorphous DLC layers and crystalline CrN layers. The intensity of the (111) diffraction peaks in DLC multilayer composite film exhibited a varying degree of reduction, and the 2θ positions of the (111) and (200) diffraction peaks showed a slight rightward shift. Raman analysis shown that the modulation period had a negligible impact on the sp3 hybridized carbon content of DLC/CrN multilayer composite films. Reduced residual stress and enhanced toughness by designing multilayer structural with modulation periods. As the modulation period decreased, the hardness and elastic modulus of DLC multilayer composite films increased. The tribological performances indicated that the primary wear mechanism between DLC/CrN multilayer composite films and Si3N4 ball in an atmospheric environment was abrasive wear, and film M2 exhibited the best tribological performance. Compared to single-layer DLC films, the residual stress of DLC/CrN multilayer composite films has been reduced by more than half, and the fracture toughness and wear rate have been significantly improved.
期刊介绍:
DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices.
The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.