Preparation of High-Performance UV Photodetectors Based on Growing ZnO Nanowires via Focused Ion Beam Exposure

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-01-27 DOI:10.1109/JSEN.2025.3531554

Jianxiang Liao;Cong Liu;Yandong Yang;Weiwei Zhong;Hui Xiao;Jiao Xu;Yuhang Liu;Dengji Guo;Xujin Wang

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引用次数: 0

Abstract

The precise patterning of micro–nano-scale photosensitive materials is crucial for the preparation of metal–semiconductor–metal (MSM)-type ultraviolet (UV) photodetectors and the integration of photodetector arrays in image sensors. However, current methods for positioning zinc oxide (ZnO) nanowires (NWs) are complex and lack sufficient accuracy. In this work, the growth of ZnO NWs at specific locations in a zinc acetate films using focused ion beam (FIB) exposure was conducted and observed. Four FIB exposure doses were employed to explore the ZnO NW growth characteristics and the influence on UV detecting performance. As the FIB exposure dose grew, the higher responsivity (R), specific detectivity (D*), and high ON/OFF ratios were measured. At an FIB exposure dose of

$1600~\mu $

C/cm2, the UV photodetector exhibited the best performance, with an on/off ratio of up to 17 445, a responsivity of 37.91 A/W, a specific detectivity of

$4.50\times 10^{13}$

Jones, and an external quantum efficiency (EQE) of 12 879.01%. Additionally, the UV photodetector fabricated with a 1600-

$\mu $

C/cm2 dose demonstrated a rapid response time of 10.17 s and a recovery time of 7.45 s. This study evaluates the influence of FIB exposure dose on ZnO NW growth and showcases the performance of UV photodetectors fabricated with different doses, providing new insights into ZnO NW growth and methods for optimizing the performance of ZnO NW-based UV photodetectors.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice