Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu, Alexandru Muller
{"title":"High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications.","authors":"Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu, Alexandru Muller","doi":"10.3390/mi16020150","DOIUrl":null,"url":null,"abstract":"<p><p>This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode. A SiO<sub>2</sub> thin layer (~50 nm thick) was employed for the functionalization of the SAW. Relative humidity characterization was performed in the range of 20-90%. The SAW sensors achieved high values of humidity sensitivity for both adsorption and desorption. The Sezawa mode showed about 2.5 times higher humidity sensitivity than the Rayleigh mode: 17.2 KHz/%RH versus 6.17 KHz/%RH for adsorption and 8.88 KHz/%RH versus 3.79 KHz/%RH for desorption.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 2","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2025-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11857800/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micromachines","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.3390/mi16020150","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and ~8 GHz for the Sezawa mode. A SiO2 thin layer (~50 nm thick) was employed for the functionalization of the SAW. Relative humidity characterization was performed in the range of 20-90%. The SAW sensors achieved high values of humidity sensitivity for both adsorption and desorption. The Sezawa mode showed about 2.5 times higher humidity sensitivity than the Rayleigh mode: 17.2 KHz/%RH versus 6.17 KHz/%RH for adsorption and 8.88 KHz/%RH versus 3.79 KHz/%RH for desorption.
期刊介绍：
Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
