A 4H–SiC Vibration Sensor With the Working Temperature up to 600 ∘C

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-02-25 DOI:10.1109/TIM.2025.3545532

Yu Yang;You Zhao;Lukang Wang;Yabing Wang;Yulong Zhao

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引用次数: 0

Abstract

High-temperature vibration sensors are critical in extreme environments such as aerospace, automotive, power generation, where common sensors fail due to excessive heat. This study introduces a vibration sensor that can withstand high temperatures up to

$600~^{\circ }$

C based on the piezoresistive effect of N-type 4H-SiC. The sensor chip was designed by theoretical modeling and multiphysics simulation, and fabricated by combining micro-electronmechanical systems (MEMSs) technology and femtosecond laser etching. The sensor performance was extensively verified from

$25~^{\circ }$

C to

$600~^{\circ }$

C. The sensitivity of the sensor decreases from 0.153 mV/g at

$25~^{\circ }$

C to 0.105 mV/g at

$600~^{\circ }$

C with a temperature coefficient of −0.054% FS/°C at

$600~^{\circ }$

C. The sensor’s sensitivity decreases essentially linearly with increasing temperature. Dynamic tests showed the sensor’s usable frequency is 0–590 Hz and the resonant frequency is 1179.85 Hz at

$25~^{\circ }$

C while decreasing to 1156.76 Hz at

$600~^{\circ }$

C. The designed sensor showed the reliability of high impact resistance up to 225% overload and random vibration. These findings suggest that the designed vibration sensor can be a promising alternative for high-temperature vibration monitoring.

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.