Development of a MEMS-Based Resonant Airflow Sensor for Apnea Detection Using Time-of-Flight Technique

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-01-22 DOI:10.1109/JSEN.2025.3529880

Parvin Akhkandi;Hannaneh Mahdavi;Reza Abdolvand

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引用次数: 0

Abstract

This article introduces a novel micro electromechanical system (MEMS)-based resonant airflow sensor designed specifically for respiration monitoring in application such as obstructive sleep apnea (OSA). The sensor operates based on the time-of-flight (ToF) technique and employs thin-film piezoelectric-on-substrate (TPoS) resonators. The resonators operate at ~25 MHz and are integrated into two oscillator circuits the frequency of which varies with temperature and humidity. By measuring the flight time of the airflow between sensing elements, the sensor can precisely calculate flow rates and velocities. A carefully designed laminar airflow channel is incorporated to maintain nonturbulent flow, which is essential for the accuracy of ToF measurements. Experimental validation demonstrates the sensor’s ability to measure flow rates from 0 to 10 L/min and velocities from 0 to 2 m/s with high precision and linearity with an accuracy as high as 97.85%. These results represent a significant advancement in respiratory monitoring technology, offering a noninvasive and cost-effective solution for home-based detection and management of OSA.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice