Features of the Physical Properties of Film Structures Based on Tungsten Nanofilms with Various Phase Composition

Abstract

The study examines the electrophysical properties of thin tungsten films deposited by magnetron sputtering, focusing on their thickness, substrate material, phase composition, and structure. The observed patterns indicate the polycrystalline nature of the films, the presence of two tungsten phases, and the isotropy of the magneto-optical properties of thin cobalt films deposited onto tungsten. The dependence of the resistivity on the thickness of the tungsten films and the substrate material is investigated both experimentally and theoretically, demonstrating the dominant contribution of charge-carrier transport across crystallite boundaries.