Hydrogenated diamond-like carbon films grown by a beam plasma source

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-02-26 DOI:10.1016/j.diamond.2025.112138

Tabitha A. Amollo , Keliang Wang , Nina Baule , Lars Haubold , Qi Hua Fan

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Abstract

Diamond like carbon (DLC) is an amorphous form of carbon consisting of sp² and sp³ hybridized carbon atoms and hydrogen. It is characterized by unique properties which suit it as a protective coating in various applications. DLC thin films are commonly produced by plasma-enhanced chemical vapor deposition (PECVD). This study reports the growth of hydrogenated DLC thin films using a novel broad beam plasma source, which enables simultaneous ion bombardments to the surface atoms and produces dense films at room temperature. A key advantage of the broad beam ion source is that it can independently control the ion flux and ion energy (20–200 eV) and thus, DLC film microstructures and properties. The film growth rates were proportional to the ion flux density, which in turn was proportional to the plasma density. An optimum ion energy of ~120 eV was identified. The DLC films exhibited high optical transmittance of 90 % from the visible to the infrared region. The optical band gaps were in the range of 2.20–2.28 eV. The prepared films exhibited a density of 1.905 g/cm³ and Young's modulus of 75 GPa. A potential application of such DLC films is as moisture barrier coatings on plastics, which require low-temperature processing.

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.