Parasitic-induced multi-zero generation and port-fusion compact filter based on 3-D through-silicon via technology

Abstract

A approach to achieving compactness and performance enhancement in lowpass filter (LPF) is described in this work. By leveraging the parasitic inductance of metal interconnects as inductive components, the proposed approach significantly reduces the overall size of the filter. Additionally, the combined effect of parasitic inductance and source-load coupling parasitic capacitance is utilized to create multiple transmission zeros, leading to improved isolation and wider bandwidth. Furthermore, a port fusion technique is introduced, which reduces the number of ports, minimizing interconnect losses and further enhancing compactness. The proposed LPF occupies a compact space of 0.31 × 0.34 mm², features a cut-off frequency of 6.31 GHz, achieves an insertion loss of 30 dB at 30 GHz, and maintains a return loss below 0.4 dB.