Impact of constant bias stress on reliability of IGZO thin-film transistors on softening polymer

IF 2.6 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Gerardo Gutierrez-Heredia , Ovidio Rodriguez-Lopez , Pedro Emanuel Rocha-Flores , Walter E. Voit
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Abstract

This study analyzed the electrical behavior of indium‑gallium‑zinc-oxide (IGZO) thin-film transistors (TFTs) under different applied voltages. The IGZO TFTs were fabricated on a polymer substrate using full photolithographic processes. The electrical performance was monitored under constant bias stress for 10,000 s and the analysis revealed relatively high field-effect mobility (>10 cm2/Vs) when higher voltages (>5 V) were applied to the IGZO TFTs. Furthermore, the experimental results demonstrated shifts in the threshold voltage (VTH), mobility, and saturation drain current, exhibiting a strong dependence on the applied voltage. After 10,000 s of bias stress, the threshold voltage shift varied by 0.5 V for the lowest applied voltage and exceeded 5 V for the higher values. Moreover, the electrical analysis indicated a significant reduction in the lifetime of IGZO TFTs when the applied voltage exceeded 15 V. These findings enable a comparative analysis of the impact of bias stress on mobility, VTH, and driving current, offering a pathway to optimize the electrical performance of TFTs-based flexible applications. Furthermore, by exploring the mechanism behind the changes induced by the constant electric field at the gate contact, this work provides insights for predicting the reliability and lifetime of novel devices tailored for wearable, flexible, and biomedical technologies.

Abstract Image

本研究分析了铟镓锌氧化物(IGZO)薄膜晶体管(TFT)在不同外加电压下的电气行为。IGZO TFT 是采用全光刻工艺在聚合物基底上制造的。在 10,000 秒的恒定偏压应力下对其电气性能进行了监测,分析结果表明,当对 IGZO TFT 施加较高电压(5 V)时,其场效应迁移率相对较高(10 cm2/Vs)。此外,实验结果表明,阈值电压 (VTH)、迁移率和饱和漏极电流都发生了变化,表现出对施加电压的强烈依赖性。经过 10,000 秒的偏压应力后,最低应用电压的阈值电压偏移为 0.5 V,而较高电压值的阈值电压偏移则超过了 5 V。此外,电学分析表明,当施加电压超过 15 V 时,IGZO TFT 的寿命会显著缩短。这些发现有助于比较分析偏压对迁移率、VTH 和驱动电流的影响,为优化基于 TFT 的柔性应用的电学性能提供了一条途径。此外,通过探索栅极接触处恒定电场诱导变化背后的机理,这项研究为预测为可穿戴、柔性和生物医学技术量身定制的新型器件的可靠性和使用寿命提供了见解。
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来源期刊
Microelectronic Engineering
Microelectronic Engineering 工程技术-工程:电子与电气
CiteScore
5.30
自引率
4.30%
发文量
131
审稿时长
29 days
期刊介绍: Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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