Impact of distributed Bragg reflectors on the intrinsic detection efficiency of superconducting nanowire single-photon detectors

IF 5.6 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Superconductivity Pub Date : 2025-03-01 DOI:10.1016/j.supcon.2025.100152

Hongxin Xu , Hailong Han , You Xiao , Jiamin Xiong , Chaomeng Ding , Zhiyun Shu , Yuchi Li , Xiaoyu Liu , Lixing You , Zhen Wang , Hao Li

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引用次数: 0

Abstract

In this study, we investigate the impact of substrates with distributed Bragg reflectors (DBRs) on the proximity effect during the fabrication of superconducting nanowire single-photon detectors (SNSPDs) using electron beam lithography. We compare the linewidth compression and line edge roughness of nanowires prepared on three different DBRs substrates. Additionally, we characterize the variations in switching current (I

_{s w}

) and intrinsic detection efficiency (IDE) at a 2.2-K temperature. The results show that when the substrates are composed of low atomic number materials, such as Si and SiO₂, the proximity effect is significantly mitigated. As a consequence, the lithography quality of nanowires is effectively improved, thus enhancing the IDE of SNSPDs. This study is expected to provide new insights into the fabrication of SNSPDs and lay the foundation for the preparation of high-performance and high-uniformity large-area devices.

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来源期刊

Superconductivity

CiteScore

3.90

自引率

0.00%

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