High Detection Efficiency 4H-SiC Avalanche Photodiode With Off-Center Top Electrode Structure

IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Yan Zhou;Tianyi Li;Xiaoqiang Tao;Weizong Xu;Dong Zhou;Feng Zhou;Fangfang Ren;Dunjun Chen;Rong Zhang;Youdou Zheng;Hai Lu
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引用次数: 0

Abstract

In this work, we report a high single photon detection efficiency 4H-SiC ultraviolet (UV) avalanche photodiode (APD) with an off-center top electrode structure. To alleviate the lateral-carrier-drift induced non-uniform gain distribution of SiC APDs, a half-ring shape top electrode structure is designed, in which the electrode is off-center placed on the $[11\overline 2 0]$ side of the circular mesa. Based on 2-dimensional photon count mapping, it is demonstrated that such device design can notably reduce the top electrode shadowing effect on the high-gain light sensitive region, thereby improving the single photon detection efficiency (SPDE) of the SiC APD. When operating in Geiger mode based on an active quenching circuit, the fabricated APD with the off-center top electrode structure shows a high SPDE of 36.7%, which is 28.7% higher than that of the control device with traditional symmetric electrode. Meanwhile, a relatively low dark count rate of ~14.4 Hz/ $\mu $ m2 is obtained. This work provides a new strategy for designing high detection efficiency SiC APDs.
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来源期刊
IEEE Photonics Technology Letters
IEEE Photonics Technology Letters 工程技术-工程:电子与电气
CiteScore
5.00
自引率
3.80%
发文量
404
审稿时长
2.0 months
期刊介绍: IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.
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