The ultra-sensitive flexible pressure sensor based on hierarchical micro-wrinkle/pyramid structure for underwater perturbation monitoring

Abstract

Underwater flexible pressure sensors have shown indispensable importance in the development of underwater monitoring and marine environment exploration. However, designing a pressure sensor with both a wide detection range and high sensitivity is still a challenge, particularly for the underwater environmental application. Herein, we have prepared a composite micro-wrinkle/pyramid Ag/PDMS sensor just using polymer swelling-electroless deposition method. By packaging the hierarchical structure with the soft electrode face-to-face, the assembled pressure sensor can reach the limit of detection about 2 Pa, high pressure even to 170 kPa, and excellent stability over 5000 cycles. In the water environment, this water proof sensor can also sensitively monitor and precisely distinguish the tiny perturbation of water, like the underwater biological monitoring, the propeller rotating speed, the location of vibration source, and the sound intensity. This flexible and low-cost sensor will become an optimal candidate for the new generation of soft marine detector.