Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensing.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Kostas Kanellopulos, Friedrich Ladinig, Stefan Emminger, Paolo Martini, Robert G West, Silvan Schmid
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引用次数: 0

Abstract

Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection. In this approach, the nanomechanical resonator detects shifts in resonant frequency due to photothermal heating. However, the relationship between photothermal sensitivity, response time, and resonator design has not been fully explored. This paper compares three resonator types - strings, drumheads, and trampolines - to explore this relationship. Through theoretical modeling, experimental validation, and finite element method simulations, we find that strings offer the highest sensitivity (with a noise equivalent power of 280 fW/Hz1/2 for strings made of silicon nitride), while drumheads exhibit the fastest thermal response. The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature. Finally, the impact of photothermal back-action is discussed, which can be a major source of frequency instability. This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors, benefiting a wide range of applications.

纳米机械谐振器的比较分析:灵敏度,响应时间,以及光热传感中的实际考虑。
纳米机械光热传感在单分子/粒子显微镜和光谱学以及红外检测方面具有显著的进步。在这种方法中,纳米机械谐振器检测由于光热加热引起的谐振频率的变化。然而,光热灵敏度、响应时间和谐振器设计之间的关系尚未得到充分的探讨。本文比较了三种谐振器类型——弦、鼓和蹦床——来探讨这种关系。通过理论建模、实验验证和有限元模拟,我们发现弦具有最高的灵敏度(氮化硅弦的噪声等效功率为280 fW/Hz1/2),而鼓面具有最快的热响应。研究表明,光热灵敏度与平均温升有关,而与峰值温度无关。最后,讨论了光热反作用的影响,这可能是频率不稳定的主要来源。这项工作澄清了谐振器设计之间的性能差异和局限性,并指导了先进纳米机械光热传感器的发展,有利于广泛的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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