One-step fabrication of Pd and Au-modified polyaniline MEMS sensors for ppb-level NH3 detection at room temperature

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-02-14 DOI:10.1016/j.sna.2025.116330

Ting Zhang , Wenfeng Shen , Dawu Lv , Weijie Song , Ruiqin Tan

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Abstract

In this work, we innovatively prepared Pd and Au-modified polyaniline MEMS ammonia sensors through a one-step in situ polymerization. The sensor exhibited an impressive 127 % response to 1 ppm NH₃ at room temperature, featuring a swift response time of 44 s, a recovery time of 91 s, a detection limit as low as 0.2 ppb, and exceptional selectivity. Furthermore, the sensor showed exceptional long-term stability over a 31-day evaluation period, with minimal response fluctuations under 6 %. The exceptional sensor performance can be attributed to its distinctive film structure and the synergistic catalytic activity of the Au and Pd nanoparticles, establishing it as an efficient, stable, and cost-effective solution for NH₃ detection. Additionally, the sensor's compact design, ease of mass production, and seamless integration with circuits make it particularly suited for applications in environmental monitoring and disease diagnostics.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...