Large-format grating groove density measurement method based on optical interferometry

IF 3.5 2区工程技术 Q2 OPTICS

Optics and Lasers in Engineering Pub Date : 2025-02-18 DOI:10.1016/j.optlaseng.2025.108885

Yujia Sun , Wenyuan Zhou , Zhaowu Liu , Wenhao Li , Shan Jiang , Lin Liu , Yanxiu Jiang , Weicheng Wang

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引用次数: 0

Abstract

In this research, an optical interference large-format grating groove density measurement method is proposed. The dual-frequency laser emits two beams of light to the test grating at Littrow Angle. The phase information of the test grating is obtained through the interference of the two diffracted light beams. Therefore, the groove density of the test grating can be calculated by the actual displacement value of the moving grating, according to the grating heterodyne measurement technology and laser interferometry technology. A system was built to verify the feasibility of the proposed method. The experimental results demonstrate that this method is capable of detecting the groove density of gratings ranging from 500 gr/mm to 3000 gr/mm in any region of the entire format, with the repetitive precision exceeding 0.01 gr/mm, and the uniformity repetitive precision surpassing 0.1 gr/mm. This method provides an effective means for fast and high-precision measurement of grating groove density.

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来源期刊

Optics and Lasers in Engineering 工程技术-光学

CiteScore

8.90

自引率

8.70%

发文量

384

审稿时长

42 days

期刊介绍： Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques