{"title":"Impact of Swift Heavy Ion Irradiation on Nano Zinc Silicate Decomposition at the ZnO–Si Junction","authors":"Sanjeev Kumar, Amit Jain, Manohar Singh","doi":"10.1134/S1063783424601759","DOIUrl":null,"url":null,"abstract":"<p>Thin films of nanocrystalline zinc oxide (nc-ZnO) have been deposited onto silicon substrates through a sol–gel route followed by annealing at 900°C, and subsequently develop a zinc–silicate layer at the ZnO–Si interface. The above interlayer was removed successfully after irradiation with 120 MeV Ag ions at different fluences of 5 × 10<sup>12</sup>, 1 × 10<sup>13</sup>, and 3 × 10<sup>13</sup> ions/cm<sup>2</sup>. Glancing angle X-ray diffraction (GAXRD) confirmed increased crystallinity, especially the stronger (002) peak at higher fluences. Fourier transform infrared (FTIR) spectra gave an indication of the disappearance of the Si–O–Zn vibration and zinc silicate phase after irradiation, thus confirming a successful removal of the unwanted interlayer through ion treatment.</p>","PeriodicalId":731,"journal":{"name":"Physics of the Solid State","volume":"67 1","pages":"48 - 51"},"PeriodicalIF":0.9000,"publicationDate":"2025-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of the Solid State","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063783424601759","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
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Abstract
Thin films of nanocrystalline zinc oxide (nc-ZnO) have been deposited onto silicon substrates through a sol–gel route followed by annealing at 900°C, and subsequently develop a zinc–silicate layer at the ZnO–Si interface. The above interlayer was removed successfully after irradiation with 120 MeV Ag ions at different fluences of 5 × 1012, 1 × 1013, and 3 × 1013 ions/cm2. Glancing angle X-ray diffraction (GAXRD) confirmed increased crystallinity, especially the stronger (002) peak at higher fluences. Fourier transform infrared (FTIR) spectra gave an indication of the disappearance of the Si–O–Zn vibration and zinc silicate phase after irradiation, thus confirming a successful removal of the unwanted interlayer through ion treatment.
期刊介绍：
Presents the latest results from Russia’s leading researchers in condensed matter physics at the Russian Academy of Sciences and other prestigious institutions. Covers all areas of solid state physics including solid state optics, solid state acoustics, electronic and vibrational spectra, phase transitions, ferroelectricity, magnetism, and superconductivity. Also presents review papers on the most important problems in solid state physics.
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