Influence of oxygen addition on the structure, mechanical and thermal properties of TiSiN coating

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2025-02-13 DOI:10.1016/j.vacuum.2025.114131

Huan W. Zhu , Jian W. Du , Jie Zhang , Li Chen

{"title":"Influence of oxygen addition on the structure, mechanical and thermal properties of TiSiN coating","authors":"Huan W. Zhu , Jian W. Du , Jie Zhang , Li Chen","doi":"10.1016/j.vacuum.2025.114131","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, the effect of oxygen content on the structure and properties of (Ti1-xSix)(OyN1-y)z coating is investigated. In (Ti1-xSix)(OyN1-y)z coatings, oxygen substitutes nitrogen atoms in TiSiN, forming a single-phase cubic solid solution structure. A small amount of oxygen addition has slight effect on the compressive stress of the coating from −8.35 ± 0.05 GPa for Ti0.83Si0.17N1.02 to −8.61 ± 0.02 GPa for (Ti0.83Si0.17)(O0.10N0.90)1.28, while further increasing oxygen leads to a drop in the compressive stress to −7.76 ± 0.05 GPa for (Ti0.82Si0.18)(O0.21N0.79)1.44 and −4.55 ± 0.01 GPa for (Ti0.82Si0.18)(O0.52N0.48)1.71. The hardness of Ti0.83Si0.17N1.02, (Ti0.83Si0.17)(O0.10N0.90)1.28, (Ti0.82Si0.18)(O0.21N0.79)1.44 and (Ti0.82Si0.18)(O0.52N0.48)1.71 coatings are 39.5 ± 0.9, 38.1 ± 0.6, 36.9 ± 1.0 and 30.5 ± 0.9 GPa, respectively, which can be maintained up to ∼ 1100 °C due to the suppressed grain growth. However, the addition of oxygen reduces the oxidation resistance of TiSiN coatings.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"235 ","pages":"Article 114131"},"PeriodicalIF":3.8000,"publicationDate":"2025-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25001216","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

Abstract

In this study, the effect of oxygen content on the structure and properties of (Ti_1-xSi_x)(O_yN_1-y)_z coating is investigated. In (Ti_1-xSi_x)(O_yN_1-y)_z coatings, oxygen substitutes nitrogen atoms in TiSiN, forming a single-phase cubic solid solution structure. A small amount of oxygen addition has slight effect on the compressive stress of the coating from −8.35 ± 0.05 GPa for Ti_0.83Si_0.17N_1.02 to −8.61 ± 0.02 GPa for (Ti_0.83Si_0.17)(O_0.10N_0.90)_1.28, while further increasing oxygen leads to a drop in the compressive stress to −7.76 ± 0.05 GPa for (Ti_0.82Si_0.18)(O_0.21N_0.79)_1.44 and −4.55 ± 0.01 GPa for (Ti_0.82Si_0.18)(O_0.52N_0.48)_1.71. The hardness of Ti_0.83Si_0.17N_1.02, (Ti_0.83Si_0.17)(O_0.10N_0.90)_1.28, (Ti_0.82Si_0.18)(O_0.21N_0.79)_1.44 and (Ti_0.82Si_0.18)(O_0.52N_0.48)_1.71 coatings are 39.5 ± 0.9, 38.1 ± 0.6, 36.9 ± 1.0 and 30.5 ± 0.9 GPa, respectively, which can be maintained up to ∼ 1100 °C due to the suppressed grain growth. However, the addition of oxygen reduces the oxidation resistance of TiSiN coatings.

查看原文本刊更多论文

求助全文

约1分钟内获得全文求助全文

来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.