Quartz Crystal Microbalance-Tag Apparatus for Wireless Mass Sensing Applications

IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Letters Pub Date : 2025-01-27 DOI:10.1109/LSENS.2025.3534996

Danidu Dilmith Jayathilaka Sinhalathilakage;Howgen Kesuma Pratama;Narayanan Ramakrishnan

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引用次数: 0

Abstract

We report a near-field communication (NFC)-enabled quartz crystal microbalance (QCM)-tag instrumentation suitable for wireless mass loading sensing applications. The proposed instrumentation utilizes a low-power microcontroller-based Pierce oscillator frequency counter system to measure series resonance frequency

$(f_{0})$

of the QCM over a time period. The system was able to record the change in

$f_{0}\,(\Delta f)$

caused by mass loading to the NFC's electrically erasable programmable read-only memory. The

$f_{0}$

measured using the proposed system was then validated against impedance analyzer measurement, and the maximum error was measured to be 0.0004%. An Android application was then developed to read log

$f_{0}$

using a smartphone. Further, we demonstrated wireless measurement of the mass loading rate of a dc sputtering system, a well-known vacuum deposition technique adopted in semiconductor process industries. Accordingly, the proposed system is an inexpensive plug-and-play solution for real-time wireless in-situ measurement of mass loading changes in sealed chambers or hazardous environments where manual measurement or wired measurement is difficult.

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用于无线质量传感的石英晶体微平衡标签装置

我们报告了一种近场通信（NFC）支持的石英晶体微天平（QCM）标签仪器，适用于无线质量负载传感应用。该仪器采用基于低功耗微控制器的皮尔斯振荡器频率计数器系统来测量QCM在一段时间内的串联谐振频率。该系统能够记录由于大量加载到NFC的电可擦可编程只读存储器中而引起的$f_{0}\,(\ δ f)$的变化。利用所提出的系统测量的$f_{0}$，然后与阻抗分析仪测量进行验证，测量出的最大误差为0.0004%。然后开发了一个Android应用程序，可以使用智能手机读取log $f_{0}$。此外，我们演示了直流溅射系统质量加载率的无线测量，这是半导体加工工业中采用的一种众所周知的真空沉积技术。因此，该系统是一种廉价的即插即用解决方案，可用于在密封室或危险环境中实时无线原位测量质量载荷变化，而手动测量或有线测量是困难的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Sensors Letters Engineering-Electrical and Electronic Engineering

CiteScore

3.50

自引率

7.10%

发文量

194