Design of a novel Z-shaped flexure hinge and a 2DOF XY precision positioning platform

Abstract

To solve the problem of inadequate amplification ratio within the precision positioning platforms, a novel Z-shaped flexure hinge (ZFH) is proposed firstly in this paper. Meanwhile, a 2DOF XY precision positioning platform which realizes secondary amplification with bridge-shaped mechanisms and novel ZFHs is designed. The novel ZFH and the platform are analyzed by static modeling with compliance matrix method and the principle of force equilibrium. The simulation results show that the errors in both stiffness and amplification ratios of the platform are within 7%, and the performance of novel ZFH is improved by 50.70%. Finally, A prototype of the platform is fabricated for performance testing. The experimental results well validate the superior performance of the platform and novel ZFH.