Research on Deterministic Ring Removal Method for Full-Aperture Double-Sided Polishing of Large Aperture Optical Components

IF 2.1 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2025-01-23 DOI:10.1109/JPHOT.2025.3532902

Yifan Bai;Bo Xiao;Chunyang Wang;Ke Chen;Linzhe Deng;Siling Huang;Xuelian Liu

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引用次数: 0

Abstract

To address the issues in polishing medium and large aperture optical components, which are reliant on the personal experience of processing personnel and exhibit poor controllability, this study conducted a comprehensive examination of the polishing process for these planar optical components. This article constructs a processing prediction model for large-diameter ring pendulum double-sided polishing equipment. Based on this, a simulation of the theoretical removal amount distribution of ring-pendulum double sided polishing was conducted to ascertain the relationship between various process parameters and their impact on the surface removal amount distribution of the component. Based on the obtained relationship, a decision support system for the process parameters of ring-pendulum double sided polishing was developed, which achieved the deterministic removal of rings in medium and large aperture planar optical components and reduced the dependence of ring pendulum double-sided polishing on the personal experience of process decision-makers. After experimental verification, the characteristics of the simulation results of the processing prediction model were consistent with the actual processing results. The developed process parameter decision assistance system was used to make process parameter decisions for two 430 * 430 mm fused quartz components, achieving the removal of the target ring of the components. The surface figure accuracy of the two components has been processed from 3.09λ and 3.5λ to 1.53λ and 1.79λ, respectively.

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.