Stopping cross section measurement for He+ in SiO2 with two angles of incidence in medium energy ion scattering spectrometry

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-02-01 DOI:10.1016/j.nimb.2024.165598

SungYup An , Chang Seon Park , Ji Ho Song , Kyungsu Park , Kyu-Sang Yu , Cheolho Jeon , Won Ja Min

引用次数: 0

Abstract

Ion-scattering spectrometry is a technique used to obtain compositional depth profiles by bombarding a sample with accelerated ions and analyzing the scattered particle energy. To obtain the depth profile from the ion-scattering spectra, simulations are usually performed using kinematic factors, scattering cross sections, stopping cross sections, and straggling, and accurate values are required for accurate analysis. This study proposes a method for obtaining stopping cross sections for pre- and post-collision energies by measuring the ion scattering spectra at the same scattering angle and at two different incident angles. Using this method, the stopping cross sections for He⁺ in SiO₂ below 100 keV were measured.

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.