Efficient chemical mechanical polishing of W promoted by Fenton-like reaction between Cu2+ and H2O2

IF 4.7 1区材料科学 Q1 METALLURGY & METALLURGICAL ENGINEERING

Transactions of Nonferrous Metals Society of China Pub Date : 2025-01-01 DOI:10.1016/S1003-6326(24)66678-1

Hong-yu CHEN , Lin WANG , Feng PENG , Meng-meng SHEN , Wei HANG , Tufa Habtamu BERI , Hui-bin ZHANG , Jun ZHAO , Yun-xiao HAN , Bing-hai LÜ

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引用次数: 0

Abstract

The Fenton-like reaction between Cu²⁺ and H₂O₂ was employed in chemical mechanical polishing to achieve efficient and high-quality processing of tungsten. The microstructure evolution and material removal rate of tungsten during polishing process were investigated via scanning electron microscopy, X-ray photoelectron spectroscopy, ultraviolet−visible spectrophotometry, and electrochemical experiments. The passivation behavior and material removal mechanism were discussed. Results show that the use of mixed H₂O₂+Cu(NO₃)₂ oxidant can achieve higher polishing efficiency and surface quality compared with the single oxidant Cu(NO₃)₂ or H₂O₂. The increase in material removal rate is attributed to the rapid oxidation of W into WO₃ via the chemical reaction between the substrate and hydroxyl radicals produced by the Fenton-like reaction. In addition, material removal rate and static etch rate exhibit significantly different dependencies on the concentration of Cu(NO₃)₂, while the superior oxidant for achieving the balance between polishing efficiency and surface quality is 0.5 wt.% H₂O₂ +1.0 wt.% Cu(NO₃)₂.

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来源期刊

Transactions of Nonferrous Metals Society of China 工程技术-冶金工程

CiteScore

7.40

自引率

17.80%

发文量

8456

审稿时长

3.6 months

期刊介绍： The Transactions of Nonferrous Metals Society of China (Trans. Nonferrous Met. Soc. China), founded in 1991 and sponsored by The Nonferrous Metals Society of China, is published monthly now and mainly contains reports of original research which reflect the new progresses in the field of nonferrous metals science and technology, including mineral processing, extraction metallurgy, metallic materials and heat treatments, metal working, physical metallurgy, powder metallurgy, with the emphasis on fundamental science. It is the unique preeminent publication in English for scientists, engineers, under/post-graduates on the field of nonferrous metals industry. This journal is covered by many famous abstract/index systems and databases such as SCI Expanded, Ei Compendex Plus, INSPEC, CA, METADEX, AJ and JICST.