700 V breakdown vertical diamond Schottky rectifier with power figure of merit 30.5 MW·cm−2

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-02-01 DOI:10.1016/j.diamond.2024.111887

Chao-Ching Chiang , Jian-Sian Li , Hsiao-Hsuan Wan , Fan Ren , Stephen J. Pearton

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引用次数: 0

Abstract

100 μm diameter Al-contact vertical Schottky rectifiers using a simple process without edge termination were fabricated on commercially available 5 μm thick p-type (net acceptor concentration 1.3 × 10¹⁶ cm⁻³) single crystal diamond drift layers deposited by Chemical Vapor Deposition on 250 μm thick heavily B-doped (3 × 10²⁰ cm⁻³) single crystal templates (7 × 7 mm²). The maximum reverse breakdown was around 700 V, with an on-resistance of 16.6 mΩ.cm², leading to a power figure-of-merit of 30.5 MW/cm². The on-voltage was −3.0 to −3.7 V, measured from 15 rectifiers fabricated over the 7 × 7 mm² area, with a reverse recovery time of 7.6 ns. The on/off ratios when switching from −5 V forward to 100 V reverse were in the range of 10⁹ to 10¹⁰. This vertical diamond rectifier is a promising technology for power switching applications.

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.