Performance improvement of self-powered n-ZnGaO/p-Si heterojunction ultraviolet photodetector using plasma-enhanced atomic layer deposition

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-02-01 DOI:10.1016/j.surfcoat.2025.131780

Chen Wang , Hui-Chen Fan , Chen-Hao Zhou , Teng-Min Fan , Yun-Shao Cho , Chien-Jung Huang , Shui-Yang Lien

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Abstract

High-performance self-powered n-ZnGaO/p-Si heterojunction ultraviolet photodetectors have been realized based on n-ZnGaO films grown by plasma enhanced atomic layer deposition under various ZnO cycle ratios from 0 % to 50 %. The ohmic contact between a simple aluminum electrode and ZnGaO can be obtained as ZnO cycle ratio increasing to 40 % and 50 %. The ZnGaO film can obtain an optimal quality with few oxygen vacancies and Zn interstitial atoms under 40 % ZnO cycle ratio. The heterojunction photodetector exhibits an obvious rectification and self-powered characteristics that can achieve a high photo-to-dark current ratio of 1.1 × 10⁵, a moderate responsivity of 23.7 mA/W and a good linear dynamic range of 100.8 dB at 0 V. In addition, the carrier transport mechanism of the heterojunction photodetectors has been demonstrated. It may provide a promising approach with low-cost and low-power consumption for the achievement of high performance self-powered ultraviolet photodetectors.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.