Structure and properties of super-hard (MoSiTiVZr)N high-entropy nitride coatings regulated by substrate bias

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-02-01 DOI:10.1016/j.surfcoat.2025.131788

Jingchuan Li , Shu Wang , Yiman Zhao , Xunwang Shi , Huaizhi Qu , XiangQing Teng , Yumin Zhang , Liangge Xu , Sam Zhang , Jiaqi Zhu

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引用次数: 0

Abstract

MoSiTiVZr high-entropy alloy coating is rich in strong nitride forming elements, and its nitride coatings have been proved to have super-high hardness, excellent wear resistance, and corrosion resistance. The energy of sputtered particles shows significant influence on properties of (MoSiTiVZr)N high-entropy nitride coatings. In this work, substrate bias of different power is applied to the sputtering deposition process of (MoSiTiVZr)N high-entropy nitride coatings to obtain deposited ions of different energies. The microstructure, hardness, fracture toughness, adhesive force, friction and corrosion resistance of the coating were investigated. The growth mode of the coating changes from columnar to granular with a raised substrate bias power (P_b). All coatings exhibit a crystal structure similar to NaCl-type face-centered cubic (FCC). The hardness changes like a parabola with the increase of the P_b, reaching a super-hard value of 48.4 GPa, which is 2.6 times that of the coating without the bias, while the fracture toughness decreases. The hardness and toughness have a combined effect to the coating adhesive force and wear resistance. The regulation mechanism of substrate bias to hardness, fracture toughness， wear resistance, adhesive force, and corrosion resistance of the coating is discussed in detail. In this study, (MoSiTiVZr)N high-entropy nitride coating synthesized with P_b of 50 W has the best comprehensive properties and is suitable for use as a protective coating.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.