Fabrication of industrial grade GMR multilayer magnetic sensors for non-recording applications

IF 2.6 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Microelectronic Engineering Pub Date : 2025-01-11 DOI:10.1016/j.mee.2024.112311

Bhagaban Behera, Umesh P. Borole, Jakeer Khan, Harish C. Barshilia, P. Chowdhury

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Abstract

Giant Magnetoresistance (GMR) technology is now becoming a popular choice in the industrial market for non-recording applications (sensor applications). In these applications, the sensor's characteristics need to be engineered for high linearity, reversibility, and high thermal stability. Among two different types of GMR technologies, such as GMR-multilayer (GMR-ML) and GMR- spin valves (GMR-SV), an attempt was made to fabricate a sensing element with high throughput based on GMR-ML due to its cost-effectiveness and relatively higher dynamic field range. Further, sensor was used as linear sensor in both omni-polar (i.e. by default) as well as bipolar (i.e. biased with permanent magnet for converting omfig ni-polar characteristics to bipolar characteristics). A detailed pilot scale fabrication of a GMR sensor with a yield of 88 % on a 4-in. wafer was presented. All the products developed using GMR-ML were evaluated in the real-time applications environment.

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用于非记录应用的工业级GMR多层磁传感器的制造

巨磁电阻（GMR）技术现在已成为工业市场中非记录应用（传感器应用）的热门选择。在这些应用中，传感器的特性需要设计成高线性、可逆性和高热稳定性。在GMR-多层（GMR- ml）和GMR-自旋阀（GMR- sv）两种不同类型的GMR技术中，由于GMR- ml具有成本效益和相对较高的动态场范围，因此尝试基于GMR- ml制造高通量的传感元件。此外，传感器在全极性（即默认）和双极性（即偏置永磁体用于将omfig ni-polar特性转换为bipolar特性）中用作线性传感器。详细的中试规模制造的GMR传感器与收率88%的4-in。晶圆饼呈上。所有使用GMR-ML开发的产品都在实时应用环境中进行了评估。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Microelectronic Engineering 工程技术-工程：电子与电气

CiteScore

5.30

自引率

4.30%

发文量

131

审稿时长

29 days

期刊介绍： Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.