Fabrication of industrial grade GMR multilayer magnetic sensors for non-recording applications

IF 2.6 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Microelectronic Engineering Pub Date : 2025-01-11 DOI:10.1016/j.mee.2024.112311

Bhagaban Behera, Umesh P. Borole, Jakeer Khan, Harish C. Barshilia, P. Chowdhury

{"title":"Fabrication of industrial grade GMR multilayer magnetic sensors for non-recording applications","authors":"Bhagaban Behera, Umesh P. Borole, Jakeer Khan, Harish C. Barshilia, P. Chowdhury","doi":"10.1016/j.mee.2024.112311","DOIUrl":null,"url":null,"abstract":"<div><div>Giant Magnetoresistance (GMR) technology is now becoming a popular choice in the industrial market for non-recording applications (sensor applications). In these applications, the sensor's characteristics need to be engineered for high linearity, reversibility, and high thermal stability. Among two different types of GMR technologies, such as GMR-multilayer (GMR-ML) and GMR- spin valves (GMR-SV), an attempt was made to fabricate a sensing element with high throughput based on GMR-ML due to its cost-effectiveness and relatively higher dynamic field range. Further, sensor was used as linear sensor in both omni-polar (i.e. by default) as well as bipolar (i.e. biased with permanent magnet for converting omfig ni-polar characteristics to bipolar characteristics). A detailed pilot scale fabrication of a GMR sensor with a yield of 88 % on a 4-in. wafer was presented. All the products developed using GMR-ML were evaluated in the real-time applications environment.</div></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":"298 ","pages":"Article 112311"},"PeriodicalIF":2.6000,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931724001801","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

Giant Magnetoresistance (GMR) technology is now becoming a popular choice in the industrial market for non-recording applications (sensor applications). In these applications, the sensor's characteristics need to be engineered for high linearity, reversibility, and high thermal stability. Among two different types of GMR technologies, such as GMR-multilayer (GMR-ML) and GMR- spin valves (GMR-SV), an attempt was made to fabricate a sensing element with high throughput based on GMR-ML due to its cost-effectiveness and relatively higher dynamic field range. Further, sensor was used as linear sensor in both omni-polar (i.e. by default) as well as bipolar (i.e. biased with permanent magnet for converting omfig ni-polar characteristics to bipolar characteristics). A detailed pilot scale fabrication of a GMR sensor with a yield of 88 % on a 4-in. wafer was presented. All the products developed using GMR-ML were evaluated in the real-time applications environment.

Abstract Image

查看原文本刊更多论文

求助全文

约1分钟内获得全文求助全文

来源期刊

Microelectronic Engineering 工程技术-工程：电子与电气

CiteScore

5.30

自引率

4.30%

发文量

131

审稿时长

29 days

期刊介绍： Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.