Characterization of a Multi-Channel CMUT Gas Sensor

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-11-27 DOI:10.1109/JMEMS.2024.3495539

Charles Boutonnet;Anurupa Shaw;Jean-Claude Bastien;François Blard;Adrien Vialletelle;Vincent Pinon;Christophe Le Blanc;Cyril Herrier;Thierry Livache;Bruno Fain

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引用次数: 0

Abstract

We report the design, the fabrication and the test of a multi-channel gas sensor based on Capacitive Micro-machined Ultrasonic Transducers (CMUT) functionalized with peptides as sensing material, dedicated to volatile organic compound (VOC) measurements in ambient air. The design, the fabrication and the electrical test of the CMUT device is reported, achieving a mass sensitivity per unit area of

$\mathrm {5.9~Hz/(ag/{\mu }m^{2})}$

. The corresponding electronics, ensuring self-sustained oscillations of the loops, is described. Experimental characterization of the loops using a Vector Network Analyser (VNA) and associated simulations using Eldo software highlight how the Barkhausen criteria are fulfilled. A gas flow setup is used to expose the sensors to different gases. The three channels of the device reveal different sensitivities to gas, ranging from

$\mathrm {0.13~Hz/ppmv}$

$\mathrm {0.41~Hz/ppmv}$

for nonane. This is attributed to different surface affinities towards nonane, confirming the potential of CMUT devices for electronic noses. [2024-0089]

查看原文本刊更多论文

多通道CMUT气体传感器的特性研究

本文报道了一种基于多肽功能化电容式微机械超声换能器（CMUT）的多通道气体传感器的设计、制造和测试，该传感器用于测量环境空气中的挥发性有机化合物（VOC）。本文介绍了CMUT装置的设计、制作和电学测试，实现了单位面积质量灵敏度$\ mathm {5.9~Hz/(ag/{\mu}m^{2})}$。描述了相应的电子元件，确保回路的自持续振荡。使用矢量网络分析仪（VNA）对回路进行实验表征，并使用Eldo软件进行相关模拟，突出了如何满足巴克豪森标准。气体流量设置用于将传感器暴露在不同的气体中。器件的三个通道显示出对气体的不同灵敏度，范围从$\ mathm {0.13~Hz/ppmv}$到$\ mathm {0.41~Hz/ppmv}$对壬烷。这归因于对壬烷的不同表面亲和力，证实了CMUT设备用于电子鼻的潜力。(2024 - 0089)

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.