Modeling and Simulation of Microstructure Geometry and Material Type on Flexible Capacitive Pressure Sensors by Finite Element Analysis

Abstract

This article presents the modeling and simulation of flexible capacitive pressure sensors based on the change of geometry, shape, and material for sensing performance improvement. For simplicity and time saving without significant loss of accuracy, the 2-D models in COMSOL Multiphysics are constructed based on different micropatterning structures. The Von Misses stress and displacement distributions and the absolute and relative capacitance changes are observed to investigate the sensing behaviors. The simulation findings indicate that the proposed model enables efficient information between the top electrode layer and the middle microstructured dielectric layer that enter into contact to create the geometry change, consequently enhancing the capacitive sensitivity. These findings provide valuable insights into the optimal sensor design with structural and material selection for flexible pressure sensors.