Removal of hydrogen impurities from granular polysilicon via microwave heating for Czochralski monocrystalline silicon

IF 6.3 2区材料科学 Q2 ENERGY & FUELS

Solar Energy Materials and Solar Cells Pub Date : 2025-01-09 DOI:10.1016/j.solmat.2025.113414

Jie Li , Xiaoying Zhou , Jinbing Zhang , Huyixiong Huang , Yongxian Rao , Qi Lei , Dongli Hu , Xusheng Wang , Shuai Yuan , Deren Yang

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引用次数: 0

Abstract

Granular polysilicon produced by the fluidized bed method has become a competitive material in the photovoltaic industry due to its cost efficiency and compatibility with continuous Czochralski (CCZ) processes. However, its high hydrogen impurity content poses challenges during monocrystalline silicon growth, leading to undesirable phenomena such as "hydrogen jump." This study investigates the removal of hydrogen impurities in granular polysilicon using microwave heating as an innovative and energy-efficient method. The effects of heating rate, temperature, and holding time on hydrogen impurity removal were systematically explored and compared to traditional resistance heating. The results reveal that microwave heating significantly enhances hydrogen impurity removal through its unique heating characteristics, facilitating the desorption and migration of hydrogen impurities via microcrack formation. Optimal parameters for impurity removal were determined, providing a promising pathway for improving the quality of granular polysilicon for monocrystalline silicon production.

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来源期刊

Solar Energy Materials and Solar Cells 工程技术-材料科学：综合

CiteScore

12.60

自引率

11.60%

发文量

513

审稿时长

47 days

期刊介绍： Solar Energy Materials & Solar Cells is intended as a vehicle for the dissemination of research results on materials science and technology related to photovoltaic, photothermal and photoelectrochemical solar energy conversion. Materials science is taken in the broadest possible sense and encompasses physics, chemistry, optics, materials fabrication and analysis for all types of materials.