Combined Swelling and Metal Infiltration: Advancing Block Copolymer Pattern Control for Nanopatterning Applications

Abstract

Block copolymer (BCP) patterning is a well-established self-assembly technique for developing surfaces with regular and controllable nanosized features. This method relies on the microphase separation of a BCP film and subsequent infiltration with inorganic species. The BCP film serves as a template, leaving behind inorganic replicas when removed. BCP patterning offers a promising, cost-effective alternative to standard nanopatterning techniques, featuring fewer processing steps and reduced energy use. However, BCP patterning can be complex and challenging to control. Varying the structural characteristics of the polymeric template (feature sizes) requires careful and often challenging synthesis of bespoke BCPs with controllable molecular weights (M_w). To develop BCP patterning as a standard nanofabrication approach, a vapor-phase patterning (VPP) technology has been developed. VPP allows for the simultaneous, single-step, selective swelling of BCP nanodomains to precise feature sizes and morphologies while forming inorganic features by metallic precursor infiltration. Infiltration preserves the swollen arrangement, thus allowing for feature size selection without synthesizing BCPs with different M_w, simplifying the process. VPP has the potential to revolutionize nanopatterning techniques in industries such as optical materials, materials for energy storage, sensors, and semiconductors by providing a pathway to efficient, precise, and cost-effective BCP template patterning.