Effect of a mesa with different sidewall angles on the spatially resolved optical properties and light extraction efficiency for GaN-based blue and green micro-LEDs.

IF 3.2 2区 物理与天体物理 Q2 OPTICS
Optics express Pub Date : 2025-01-27 DOI:10.1364/OE.548067
Shengquan Jiang, Qitao Duan, Guoqi Ai, Yu Liu, Hui Lin, Yurong Dai, Zhong Chen, TingZhu Wu, Yue Lin
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引用次数: 0

Abstract

In this paper, we studied the sidewall conditions of 28 × 52 µm2 InGaN-based blue and green micro-LEDs with different sidewall angles and their effects on external quantum efficiency (EQE). Our findings indicate that steeper sidewall mesas can reduce non-radiative recombination and leakage current, which is beneficial for achieving high internal quantum efficiency (IQE). However, as the sidewall angle increases, the light output from the micro-LED tends to concentrate in the internal region, leading to a decrease in light extraction efficiency (LEE). Using microscopic hyperspectral imaging, we observed distinct chromaticity characteristic distributions in the internal area of mesas with different sidewall angles, compared to the entire micro-LEDs. Mesas with gentler sidewalls exhibited lower chromaticity stability. For both blue and green micro-LEDs, the optimal sidewall tilt angle was found to be 48°, yielding the highest EQE. This result reflects a trade-off between LEE and IQE. Notably, the improvement in IQE for green micro-LEDs was not as significant as that for blue micro-LEDs, likely due to the higher indium content in green InGaN micro-LEDs, which results in deeper localized potential wells and a higher dislocation density. This work demonstrates the variation of IQE and LEE for blue and green micro-LEDs fabricated on mesas with different sidewall angles, aimed at achieving the highest EQE.

不同侧壁角度对氮化镓基蓝绿微型led空间分辨光学特性和光提取效率的影响。
本文研究了不同边壁角度下28 × 52µm2 ingan基蓝绿微led的边壁条件及其对外部量子效率(EQE)的影响。研究结果表明,更陡的侧壁平台可以减少非辐射复合和泄漏电流,有利于实现高内量子效率(IQE)。然而,随着侧壁角的增大,微型led的光输出倾向于向内部区域集中,导致光提取效率(LEE)下降。通过显微高光谱成像,我们观察到与整个微型led相比,不同侧壁角度的台面内部区域的色度特征分布不同。侧壁较软的台面表现出较低的色度稳定性。对于蓝色和绿色微型led,发现最佳侧壁倾斜角度为48°,产生最高的EQE。这个结果反映了LEE和IQE之间的权衡。值得注意的是,绿色微型led的IQE改善不如蓝色微型led显著,这可能是由于绿色InGaN微型led中铟含量较高,从而导致更深的局域势阱和更高的位错密度。这项工作展示了在不同侧壁角度的台面上制造的蓝色和绿色微型led的IQE和LEE的变化,旨在实现最高的EQE。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Optics express
Optics express 物理-光学
CiteScore
6.60
自引率
15.80%
发文量
5182
审稿时长
2.1 months
期刊介绍: Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.
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