Analysis of inversion-domain boundaries in four-layer polarity-inverted AlN structure

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-01-23 DOI:10.1063/5.0249911

Tomohiro Tamano, Kanako Shojiki, Toru Akiyama, Ryota Akaike, Takao Nakamura, Hiroto Honda, Eiki Sato, Masahiro Uemukai, Tomoyuki Tanikawa, Ryuji Katayama, Hideto Miyake

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引用次数: 0

Abstract

We have fabricated a four-layer polarity-inverted aluminum nitride (AlN) structure using a combination of sputtering and face-to-face annealing. We investigated the impurity concentrations and structure of the polarity inversion-domain boundaries (IDBs) of the four-layer polarity-inverted AlN structure. Atomic-scale observations revealed that the interface of the IDBs from Al-polar AlN to N-polar AlN consists of three monolayers (MLs) of O-Al-O, while the IDBs from N-polar AlN to Al-polar AlN consist of 8–10 ML of AlxOyNz. Additionally, the positions of the IDBs from N-polar AlN to Al-polar AlN shifted by 20–30 nm from the interface of sputtered AlN toward the surface, whereas those from Al-polar AlN to N-polar AlN remained at the same position as the interface of sputtered AlN. The interface energies of these IDBs were investigated using first-principles calculations, which support the O-Al-O structure for the IDB from Al-polar AlN to N-polar AlN and the AlxOyNz structure for the IDBs from N-polar AlN to Al-polar AlN.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.