Nano-mechanical and condensed phase characterization of cylindrical magnetron sputtered self-assembled TiN nano-hill coating

IF 2.1 4区材料科学 Q3 CHEMISTRY, MULTIDISCIPLINARY

Journal of Nanoparticle Research Pub Date : 2025-01-17 DOI:10.1007/s11051-024-06208-8

Sayan Atta, Uttamchand NarendraKumar, K. V. A. N. P. S. Kumar, D. P. Yadav, Sanjay Kumar Rai, Pooja Gupta, Sitaram Dash

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Abstract

TiN nano-layered thin films were synthesized using an indigenously built cylindrical magnetron sputtering (CMS) apparatus at varying nitrogen flow rates ranging between 5 and 45 sccm at a constant deposition pressure of 9.5 × 10⁻² mbar. Grazing incidence X-ray diffraction (GIXRD), atomic force microscopy (AFM), laser Raman spectroscopy (LRS), and nano-indentation studies were performed to characterize these as-deposited films. Unlike conventional sputtering, CMS grown films exhibited Stranski–Krastanov (SK) growth with self-assembled nano-hill architecture. The growth of nano-hills is attributed to the shadowing effect of oblique incident flux arising from cylindrical shaped cathode. Additional relaxation based on inverse Hall–Petch formalism brings about indentation induced buckling of nano-hills leading to softening of the TiN films. Higher hill heights at lower nitrogen flow led to increased friction and wear as they are crushed under the applied load generating debris. In contrast, the shorter nano-hills at high nitrogen flow tend to buckle rather than collapse under indenter load resulting in reduced friction. Coefficient of friction value is further influenced by the angle between nano-hill arrays, growth orientation, and indenter sliding directions. Raman spectroscopy data shows the appearance of high wave number anti-symmetric A + O mode for films synthesized at higher argon or nitrogen concentrations.

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圆柱形磁控溅射自组装TiN纳米hill涂层的纳米力学和凝聚相表征

采用自制的圆柱形磁控溅射（CMS）装置，在恒定沉积压力为9.5 × 10−2 mbar、氮气流量为5 ~ 45 sccm的条件下，制备了TiN纳米层状薄膜。通过掠入射x射线衍射（GIXRD）、原子力显微镜（AFM）、激光拉曼光谱（LRS）和纳米压痕研究对这些沉积膜进行了表征。与传统溅射不同，CMS生长薄膜表现出自组装纳米山结构的Stranski-Krastanov （SK）生长。纳米丘的生长是由于圆柱形阴极斜入射通量的遮蔽作用所致。基于逆Hall-Petch形式的额外弛豫导致纳米丘的压痕屈曲，导致TiN薄膜的软化。在较低的氮流量下，较高的山坡高度导致摩擦和磨损增加，因为它们在施加的载荷下被压碎，产生碎片。相比之下，在高氮流量下，较短的纳米丘在压头载荷下倾向于屈曲而不是坍塌，导致摩擦减少。摩擦系数的大小受纳米丘阵列夹角、生长方向和压头滑动方向的影响。拉曼光谱数据表明，在较高的氩气或氮气浓度下合成的薄膜出现高波数反对称A + O模式。

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来源期刊

Journal of Nanoparticle Research 工程技术-材料科学：综合

CiteScore

4.40

自引率

4.00%

发文量

198

审稿时长

3.9 months

期刊介绍： The objective of the Journal of Nanoparticle Research is to disseminate knowledge of the physical, chemical and biological phenomena and processes in structures that have at least one lengthscale ranging from molecular to approximately 100 nm (or submicron in some situations), and exhibit improved and novel properties that are a direct result of their small size. Nanoparticle research is a key component of nanoscience, nanoengineering and nanotechnology. The focus of the Journal is on the specific concepts, properties, phenomena, and processes related to particles, tubes, layers, macromolecules, clusters and other finite structures of the nanoscale size range. Synthesis, assembly, transport, reactivity, and stability of such structures are considered. Development of in-situ and ex-situ instrumentation for characterization of nanoparticles and their interfaces should be based on new principles for probing properties and phenomena not well understood at the nanometer scale. Modeling and simulation may include atom-based quantum mechanics; molecular dynamics; single-particle, multi-body and continuum based models; fractals; other methods suitable for modeling particle synthesis, assembling and interaction processes. Realization and application of systems, structures and devices with novel functions obtained via precursor nanoparticles is emphasized. Approaches may include gas-, liquid-, solid-, and vacuum-based processes, size reduction, chemical- and bio-self assembly. Contributions include utilization of nanoparticle systems for enhancing a phenomenon or process and particle assembling into hierarchical structures, as well as formulation and the administration of drugs. Synergistic approaches originating from different disciplines and technologies, and interaction between the research providers and users in this field, are encouraged.