Marcella Salvatore, Francesco Reda, Fabio Borbone and Stefano Luigi Oscurato
{"title":"Multilevel azopolymer patterning from digital holographic lithography","authors":"Marcella Salvatore, Francesco Reda, Fabio Borbone and Stefano Luigi Oscurato","doi":"10.1039/D4LF00358F","DOIUrl":null,"url":null,"abstract":"<p >Azopolymer-based maskless lithography enables direct, all-optical fabrication of complex surface patterns. However, typical surface reliefs are limited to smooth profiles. Here, by investigating the resolution, contrast ratio, and gray-scale nonlinearities of a holo-lithographic setup based on computer-generated holography, we extend this patterning approach to fabricate, for the first time, multilevel reliefs with step-like discontinuities.</p>","PeriodicalId":101138,"journal":{"name":"RSC Applied Interfaces","volume":" 1","pages":" 56-60"},"PeriodicalIF":0.0000,"publicationDate":"2024-11-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2025/lf/d4lf00358f?page=search","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSC Applied Interfaces","FirstCategoryId":"1085","ListUrlMain":"https://pubs.rsc.org/en/content/articlelanding/2025/lf/d4lf00358f","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Azopolymer-based maskless lithography enables direct, all-optical fabrication of complex surface patterns. However, typical surface reliefs are limited to smooth profiles. Here, by investigating the resolution, contrast ratio, and gray-scale nonlinearities of a holo-lithographic setup based on computer-generated holography, we extend this patterning approach to fabricate, for the first time, multilevel reliefs with step-like discontinuities.
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