Tantalum Pentoxide Integrated Photonics: A Promising Platform for Low-Loss Planar Lightwave Circuits with Low Thermo-Optic Coefficients

IF 6.5 1区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Zhenyu Liu, Wenle Yao, Mingjian You, Xiaolun Yu, Ning Ding, Weiren Cheng, Zhengqi Li, Xingyu Tang, Fei Guo, Dan Lu, Qiancheng Zhao
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引用次数: 0

Abstract

Photonic integrated external laser cavities are transformative components in laser frequency stabilization and linewidth narrowing applications. A key challenge in contemporary photonic integration is to realize low-loss waveguides while balancing the thermo-optic response of the cavities. Tantalum pentoxide (Ta2O5) has emerged as a promising photonic platform due to its low thermo-optic coefficient (TOC) and low material loss. Incorporating Ta2O5/SiO2 waveguides into a photonic circuit requires trade-offs among waveguide loss, device footprints, thermorefractive noise, optical I/O efficiency, and other desired functionalities. In this work, we present a Ta2O5 photonic platform that emphasizes low propagation loss and low thermo-optic sensitivity. We demonstrate that the intrinsic Q factors of these resonators exceed 106, corresponding to a propagation loss of 0.27 dB/cm at 1550 nm, using our CMOS-compatible fabrication technique. The temperature-dependent wavelength shift (TDWS) of the Ta2O5 resonators is merely 9 pm/K. The thermorefractive frequency noise of the Ta2O5 microresonators is predicted to be half smaller than that of Si3N4 resonators. Several key building blocks of integrated external laser cavities were demonstrated, including high-Q resonators, self-coupled microresonators, Vernier ring resonators, Sagnac loop mirrors, edge couplers, and Y-branch splitters, which contribute to a comprehensive suite of planar lightwave components on the Ta2O5 platform. A narrow-linewidth hybrid-integrated laser has been demonstrated, utilizing a distributed feedback (DFB) laser diode self-injection locked to a Ta2O5 microresonator. A fundamental linewidth of 1.6 kHz has been obtained. The distinctive optical characteristics of the Ta2O5 waveguides could have a broader impact on high-capacity, temperature-robust, and multifunctional photonic integrated circuits, which are essential for the next-generation photonic computing systems, quantum photonic circuits, and beyond.

Abstract Image

五氧化二钽集成光子学:具有低热光系数的低损耗平面光波电路的有前途的平台
光子集成外腔是激光稳频和窄线宽应用中的变革性元件。当代光子集成的一个关键挑战是实现低损耗波导,同时平衡腔的热光响应。五氧化二钽(Ta2O5)由于其低热光学系数(TOC)和低材料损耗而成为一种很有前途的光子平台。将Ta2O5/SiO2波导集成到光子电路中需要在波导损耗、器件占地面积、热折射率噪声、光学I/O效率和其他所需功能之间进行权衡。在这项工作中,我们提出了一个Ta2O5光子平台,强调低传播损耗和低热光学灵敏度。我们证明了这些谐振器的固有Q因子超过106,对应于在1550 nm处的传播损耗为0.27 dB/cm,使用我们的cmos兼容制造技术。Ta2O5谐振器的温度相关波长位移(TDWS)仅为9 pm/K。预测Ta2O5微谐振器的热折频噪声比Si3N4微谐振器小一半。演示了集成外部激光腔的几个关键组成部分,包括高q谐振器、自耦合微谐振器、游标环谐振器、Sagnac环镜、边缘耦合器和y分支分离器,它们有助于在Ta2O5平台上形成一套全面的平面光波组件。利用分布式反馈(DFB)激光二极管自注入锁定在Ta2O5微谐振器上,展示了窄线宽混合集成激光器。得到了1.6 kHz的基线宽度。Ta2O5波导的独特光学特性可能对高容量、耐温、多功能光子集成电路产生更广泛的影响,这对下一代光子计算系统、量子光子电路等至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
ACS Photonics
ACS Photonics NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
11.90
自引率
5.70%
发文量
438
审稿时长
2.3 months
期刊介绍: Published as soon as accepted and summarized in monthly issues, ACS Photonics will publish Research Articles, Letters, Perspectives, and Reviews, to encompass the full scope of published research in this field.
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