Real-Time Detection and Dynamic Compensation of Mismatch in Rate-Integrating MEMS Gyroscopes Using Virtual Rotation

Abstract

Rate-integrating gyroscopes provide significant advantages in temperature stability and bandwidth. However, their performance is not fully realized due to the X–Y mismatches in the micro-electromechanical systems (MEMS) resonator, usually caused by fabrication imperfections, aging, or temperature fluctuation. This letter presents a novel approach for real-time detection and dynamic compensation of these mismatches based on a virtual rotation technique. The proposed method detects the mismatch parameters as the angle dependence of clockwise and counterclockwise frequencies, which has the same degree of freedom as the stiffness and damping mismatch parameters, meaning that it could fully detect all of the mismatch information. A method to determine the mismatch compensation signals based on linear transformation is developed, minimizing all of the mismatch signals by four independent PI controllers. The real-time mismatch compensation was experimentally demonstrated using the software-defined MEMS gyroscope system. This approach paves the way for the practical deployment of rate-integrating MEMS gyroscopes.