A Dual-Parameter Interrogation Fano Resonance Sensor Based on All-Oxide Multilayer Film for Biomolecule Detection

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2024-11-12 DOI:10.1109/JSEN.2024.3493033

Chengzhang Han;Ning Li;Tongqian Zhang;Jingjie Dai

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引用次数: 0

Abstract

We present an innovative Fano resonance sensor based on an all-oxide multilayer film for biomolecule detection. The sensor, consisting of a rutile prism, indium tin oxide (ITO), SiO2, and TiO2 layers, employs a Kretschmann configuration to induce Fano resonance. The sensor features a straightforward structure, economical cost, strong stability, compatibility with CMOS processes, and excellent biological affinity. The sensor is produced by a multitarget magnetron sputtering technique in one go, which streamlines the process, minimizes material and energy waste, and is appropriate for large-scale industrial manufacturing. The sensor functioning in the near-infrared spectrum exhibits less photodamage and phototoxicity to living biological materials, rendering it optimal for real-time monitoring of the dynamic processes within living cells in biological and medical applications. The sensor provides dual-parameter measuring capabilities, encompassing wavelength and phase interrogation, attaining high sensitivity (656 nm/RIU and

$2.6\times 10^{{5}}~^{\circ }$

/RIU) and a figure of merit (FOM) of 1093. Experimental results indicate the sensor’s effectiveness in identifying biomolecules with exceptional real-time detection capability and superior selectivity. This work advances Fano resonance sensors from theory to practical applications, serves as a reference for designing high-sensitivity sensors, and expands their potential application in chemical analysis, medical diagnostics, and environmental monitoring.

查看原文本刊更多论文

基于全氧化物多层膜的双参数探询法诺共振传感器用于生物分子检测

我们提出了一种创新的基于全氧化物多层膜的Fano共振传感器，用于生物分子检测。该传感器由金红石棱镜、氧化铟锡（ITO）、SiO2和TiO2层组成，采用克雷茨曼结构诱导法诺共振。该传感器结构简单，成本经济，稳定性强，与CMOS工艺兼容，具有优异的生物亲和力。该传感器采用多目标磁控溅射技术一次性生产，简化了工艺流程，最大限度地减少了材料和能源的浪费，适合大规模工业制造。在近红外光谱中工作的传感器对活生物材料具有较小的光损伤和光毒性，使其成为实时监测生物和医学应用中活细胞内动态过程的最佳选择。该传感器提供双参数测量功能，包括波长和相位查询，具有高灵敏度（656nm /RIU和$2.6\times 10^{{5}}~^{\circ}$ /RIU）和1093的品质因数（FOM）。实验结果表明，该传感器在识别生物分子方面具有优异的实时检测能力和选择性。本工作将法诺共振传感器从理论推进到实际应用，为设计高灵敏度传感器提供了参考，并拓展了其在化学分析、医学诊断和环境监测等方面的潜在应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice