A novel slurry for ultra-smooth chemical mechanical polishing of TC4 titanium alloy

IF 6.3 2区 材料科学 Q2 CHEMISTRY, PHYSICAL
Longxing Liao , Fuli Cai , Xuefeng Chang , Chengbin Zhao , Jingyu Mo , Jian Shun
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Abstract

TiC4 titanium alloy has become one of the most important materials for aerospace and medical device applications due to its advantages such as good biocompatibility and high specific strength. However, the high hardness and low thermal conductivity of TiC4 make it challenging to machine. Therefore, a novel chemical mechanical polishing (CMP) slurry for TC4 titanium alloy was developed to achieve its ultra-smooth surface polishing. Firstly, five slurries with different compositions were prepared, and the polishing effect of each slurry was analyzed. The results demonstrate that the slurry containing 2-aminobenzoic acid (2-ANA) as a chelating agent exhibits the best polishing performance with Ra of 0.661 nm and material removal rate of 173.9 nm/min. Subsequently, the influence laws of different slurry on the polishing effect of TC4 were explored by electrochemical tests. Finally, based on XPS and infrared test characterisation, the CMP mechanism of TC4 was revealed as follows: hydrogen peroxide oxidises the Ti element into high-valent oxides, the −N–H and −O–H groups in 2-ANA combine with metal ions in solution to form complexes, and this chemical process reaches a dynamic equilibrium with the mechanical action of abrasive grains to ultimately achieve the ultra-smooth polishing of TC4.

Abstract Image

Abstract Image

一种用于TC4钛合金超光滑化学机械抛光的新型浆料
TiC4钛合金由于具有良好的生物相容性和高比强度等优点,已成为航空航天和医疗器械应用的重要材料之一。然而,TiC4的高硬度和低导热性给其加工带来了挑战。为此,研制了一种新型TC4钛合金化学机械抛光浆,以实现TC4钛合金表面的超光滑抛光。首先,制备了5种不同成分的浆料,并对每种浆料的抛光效果进行了分析。结果表明,以2-氨基苯甲酸(2-ANA)为螯合剂的抛光浆抛光性能最佳,Ra值为0.661 nm,去除率为173.9 nm/min。随后,通过电化学试验探讨了不同料浆对TC4抛光效果的影响规律。最后,基于XPS和红外测试表征,揭示了TC4的CMP机理:过氧化氢将Ti元素氧化成高价氧化物,2-ANA中的- N-H和- O-H基团与溶液中的金属离子结合形成配合物,该化学过程与磨料颗粒的力学作用达到动态平衡,最终实现TC4的超光滑抛光。
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来源期刊
Applied Surface Science
Applied Surface Science 工程技术-材料科学:膜
CiteScore
12.50
自引率
7.50%
发文量
3393
审稿时长
67 days
期刊介绍: Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.
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