{"title":"Development of a Flexible Capacitive Tactile-Proximity Sensor Array With CMOS Integration for Enhanced Sensitivity","authors":"Chi-Tang Tsao;Michael S.-C. Lu","doi":"10.1109/JSEN.2024.3486106","DOIUrl":null,"url":null,"abstract":"The integration of tactile and proximity sensors enhances our ability to perceive and interact with both touchable and touch-free objects within our environment. Flexible electronics technology, particularly in capacitive sensing, provides an ideal foundation for developing advanced tactile-proximity sensors. In this study, we present an integrated capacitive tactile-proximity sensor that combines with complementary metal-oxide-semiconductor (CMOS) readout circuitry to achieve enhanced sensitivity and system miniaturization. By utilizing four metal layers from two flexible substrates available through commercial technology, we efficiently fabricate an \n<inline-formula> <tex-math>$8 \\times 8$ </tex-math></inline-formula>\n tactile sensor array integrated with proximity sensing capabilities. Finite-element simulations are conducted to validate the measured data. Experiment results demonstrate that the tactile sensors achieve an average sensitivity of 2.2 MPa\n<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula>\n with a resolution of 255 Pa, while the proximity sensing exhibits a detection range of approximately 15 mm with a resolution better than \n<inline-formula> <tex-math>$1.9 \\; \\mu $ </tex-math></inline-formula>\nm. These findings demonstrate the significant potential of flexible tactile-proximity sensors for applications requiring high sensitivity and precision in detection.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"24 24","pages":"40541-40548"},"PeriodicalIF":4.3000,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10740614/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
The integration of tactile and proximity sensors enhances our ability to perceive and interact with both touchable and touch-free objects within our environment. Flexible electronics technology, particularly in capacitive sensing, provides an ideal foundation for developing advanced tactile-proximity sensors. In this study, we present an integrated capacitive tactile-proximity sensor that combines with complementary metal-oxide-semiconductor (CMOS) readout circuitry to achieve enhanced sensitivity and system miniaturization. By utilizing four metal layers from two flexible substrates available through commercial technology, we efficiently fabricate an
$8 \times 8$
tactile sensor array integrated with proximity sensing capabilities. Finite-element simulations are conducted to validate the measured data. Experiment results demonstrate that the tactile sensors achieve an average sensitivity of 2.2 MPa
$^{-{1}}$
with a resolution of 255 Pa, while the proximity sensing exhibits a detection range of approximately 15 mm with a resolution better than
$1.9 \; \mu $
m. These findings demonstrate the significant potential of flexible tactile-proximity sensors for applications requiring high sensitivity and precision in detection.
期刊介绍:
The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following:
-Sensor Phenomenology, Modelling, and Evaluation
-Sensor Materials, Processing, and Fabrication
-Chemical and Gas Sensors
-Microfluidics and Biosensors
-Optical Sensors
-Physical Sensors: Temperature, Mechanical, Magnetic, and others
-Acoustic and Ultrasonic Sensors
-Sensor Packaging
-Sensor Networks
-Sensor Applications
-Sensor Systems: Signals, Processing, and Interfaces
-Actuators and Sensor Power Systems
-Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting
-Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data)
-Sensors in Industrial Practice