Development of a Flexible Capacitive Tactile-Proximity Sensor Array With CMOS Integration for Enhanced Sensitivity

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Chi-Tang Tsao;Michael S.-C. Lu
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Abstract

The integration of tactile and proximity sensors enhances our ability to perceive and interact with both touchable and touch-free objects within our environment. Flexible electronics technology, particularly in capacitive sensing, provides an ideal foundation for developing advanced tactile-proximity sensors. In this study, we present an integrated capacitive tactile-proximity sensor that combines with complementary metal-oxide-semiconductor (CMOS) readout circuitry to achieve enhanced sensitivity and system miniaturization. By utilizing four metal layers from two flexible substrates available through commercial technology, we efficiently fabricate an $8 \times 8$ tactile sensor array integrated with proximity sensing capabilities. Finite-element simulations are conducted to validate the measured data. Experiment results demonstrate that the tactile sensors achieve an average sensitivity of 2.2 MPa $^{-{1}}$ with a resolution of 255 Pa, while the proximity sensing exhibits a detection range of approximately 15 mm with a resolution better than $1.9 \; \mu $ m. These findings demonstrate the significant potential of flexible tactile-proximity sensors for applications requiring high sensitivity and precision in detection.
基于CMOS集成的柔性电容式触觉接近传感器阵列的研制
触觉和接近传感器的集成增强了我们感知环境中可触摸和非触摸物体并与之交互的能力。柔性电子技术,特别是在电容传感方面,为开发先进的触觉接近传感器提供了理想的基础。在这项研究中,我们提出了一种集成的电容式触觉接近传感器,该传感器结合了互补金属氧化物半导体(CMOS)读出电路,以实现增强的灵敏度和系统小型化。通过利用商业技术可获得的两个柔性基板的四个金属层,我们有效地制造了具有近距离传感功能的8 × 8美元触觉传感器阵列。通过有限元仿真验证了测量数据的正确性。实验结果表明,触觉传感器的平均灵敏度为2.2 MPa $^{-{1}}$,分辨率为255 Pa,而近距离传感的检测范围约为15 mm,分辨率优于$1.9 \;这些发现证明了柔性触觉接近传感器在检测中需要高灵敏度和精度的应用中的巨大潜力。
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来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
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