Flexible Capacitive Pressure Sensor With Optimized Interdigital AgNWs Electrodes for Wide-Range Pressure Monitoring

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Chuner Ni;Siyan Shang;Jiahui Xu;Minyi Jin;Hao Jiang;Ruiyu Bai;Minghao Wang;Bowen Ji;Tiling Hu;Wenwei Yang;Yue Hu;Yuhua Cheng;Hui Hong;Linxi Dong
{"title":"Flexible Capacitive Pressure Sensor With Optimized Interdigital AgNWs Electrodes for Wide-Range Pressure Monitoring","authors":"Chuner Ni;Siyan Shang;Jiahui Xu;Minyi Jin;Hao Jiang;Ruiyu Bai;Minghao Wang;Bowen Ji;Tiling Hu;Wenwei Yang;Yue Hu;Yuhua Cheng;Hui Hong;Linxi Dong","doi":"10.1109/JSEN.2024.3486089","DOIUrl":null,"url":null,"abstract":"Flexible capacitive pressure sensors are widely used in many applications due to their simple structure and low cost. However, high sensitivity and wide linear range are often incompatible. To solve this problem, five kinds of capacitance structures based on interdigital microneedle array electrode (IMAE) with different needle spacing and needle height are simulated and fabricated in this work. The two face-to-face bonded microneedle arrays (MNAs) in the IMAE are fabricated by template casting with PDMS as substrate. Silver nanowires (AgNWs) dispersion liquids with different concentrations are spin-coated on the MNA to serve as conductive electrodes. PDMS doped with AgNWs is used as a dielectric adhesive layer to increase the dielectric constant. The AgNWs-coated IMAE can increase the effective electrode area and deformation capacity dramatically when compared to the flat metal electrode. The optimized IMAE sensor with a needle height of \n<inline-formula> <tex-math>$600~\\mu $ </tex-math></inline-formula>\n m and needle spacing of \n<inline-formula> <tex-math>$800~\\mu $ </tex-math></inline-formula>\n m makes a maximal sensitivity of 0.059 kPa\n<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula>\n from 0 to 60 kPa (linearity of 6.57%). The linear measuring range of the IMAE sensor is much wider than that of the sensor based on the flat electrode. By introducing NaHCO3-induced air gap into the dielectric layer, the maximum sensitivity can be improved to 0.203 kPa\n<inline-formula> <tex-math>$^{-{1}}$ </tex-math></inline-formula>\n from 0 to 3 kPa. The IMAE sensor has a fast response time (125/250 ms) and can maintain performance without degradation through 2500 test cycles. It shows good performance in wide-range pressure monitoring such as micromass (160 mg) detection, pulse monitoring, twist, and gesture measurement.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"24 24","pages":"40532-40540"},"PeriodicalIF":4.3000,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10739955/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

Flexible capacitive pressure sensors are widely used in many applications due to their simple structure and low cost. However, high sensitivity and wide linear range are often incompatible. To solve this problem, five kinds of capacitance structures based on interdigital microneedle array electrode (IMAE) with different needle spacing and needle height are simulated and fabricated in this work. The two face-to-face bonded microneedle arrays (MNAs) in the IMAE are fabricated by template casting with PDMS as substrate. Silver nanowires (AgNWs) dispersion liquids with different concentrations are spin-coated on the MNA to serve as conductive electrodes. PDMS doped with AgNWs is used as a dielectric adhesive layer to increase the dielectric constant. The AgNWs-coated IMAE can increase the effective electrode area and deformation capacity dramatically when compared to the flat metal electrode. The optimized IMAE sensor with a needle height of $600~\mu $ m and needle spacing of $800~\mu $ m makes a maximal sensitivity of 0.059 kPa $^{-{1}}$ from 0 to 60 kPa (linearity of 6.57%). The linear measuring range of the IMAE sensor is much wider than that of the sensor based on the flat electrode. By introducing NaHCO3-induced air gap into the dielectric layer, the maximum sensitivity can be improved to 0.203 kPa $^{-{1}}$ from 0 to 3 kPa. The IMAE sensor has a fast response time (125/250 ms) and can maintain performance without degradation through 2500 test cycles. It shows good performance in wide-range pressure monitoring such as micromass (160 mg) detection, pulse monitoring, twist, and gesture measurement.
柔性电容压力传感器与优化的数字间AgNWs电极,用于大范围压力监测
柔性电容式压力传感器以其结构简单、成本低廉等优点得到了广泛的应用。然而,高灵敏度和宽线性范围往往是不相容的。为了解决这一问题,本文模拟并制作了5种不同针距和针高的数字间微针阵列电极(IMAE)电容结构。采用模板铸造的方法,以PDMS为衬底制备了IMAE中的两个面对面键合微针阵列。将不同浓度的银纳米线(AgNWs)分散液自旋涂覆在MNA上作为导电电极。将掺有AgNWs的PDMS用作介电胶粘剂层以提高介电常数。与平面金属电极相比,包裹agnws的IMAE有效电极面积和变形能力显著增加。优化后的IMAE传感器针高为$600~\mu $ m,针间距为$800~\mu $ m,在0~ 60 kPa范围内的最大灵敏度为0.059 kPa $^{-{1}}$(线性度为6.57%)。IMAE传感器的线性测量范围比基于平面电极的传感器宽得多。通过在介质层中引入nahco3诱导气隙,可将最大灵敏度提高到0.203 kPa $^{-{1}}$从0提高到3 kPa。IMAE传感器具有快速响应时间(125/250 ms),并且可以通过2500个测试循环保持性能而不下降。它在大范围压力监测中表现出良好的性能,如微质量(160 mg)检测、脉冲监测、扭转和手势测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
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